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US 11,373,679 B1Granted
Recording head with focusing structure
AssigneeSeagate Technology LLC
InventorsRuoxi Yang, YongJun Zhao, Nan Zhou, Weibin Chen, Huaqing Yin, Michael Allen Seigler
Life of this patent
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Abstract
A recording head includes a near-field transducer proximate a media-facing surface of the recording head and a waveguide that overlaps and delivers light to the near-field transducer. The recording head includes subwavelength-sized focusing mirror comprising first and second reflectors disposed on cross track sides of the near-field transducer. Each of the first and second reflectors is spaced apart from the media-facing surface by a distance, D, measured along an axis normal to the media-facing surface.
Claims14
A method, comprising:
- forming a patterned first hard mask comprising a plurality of layers;
- removing at least one layer of the first hard mask to expose a layer of tantalum nitride having first and second portions on opposing sides of a patterned line structure, wherein the line structure has a first end having a first width and a second end having a second width, smaller than the first width, and the second width is consistent along at least a third of the length of the line structure;
- forming a second hard mask on the exposed layer, wherein the second hard mask is patterned to include an opening over the first and second portions adjacent the line structure and a parabolic-shaped extension into the opening overlapping the second end of the line structure;
- removing the second hard mask and regions of the first and second portions exposed through the opening in the second hard mask;
- depositing optically reflective material in the regions of the first and second portions to form first and second reflectors of a subwavelength-sized focusing mirror, each of the first and second reflectors having a curved edge coupled to a straight edge, wherein the straight edges are spaced apart from each other by a distance of the second width.
2 more elements
Dependencies are inferred from the claim text.