Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same

A method of manufacturing a silicon single crystal by Czochralski (CZ) method, comprising:

• setting a seed crystal to a seed crystal holder;
• lowering the seed crystal holder to dip the seed crystal into a silicon melt;
• and
• pulling up the seed crystal with the seed crystal holder to grow the silicon single crystal,
• wherein the seed crystal holder is made of a carbon fiber-reinforced carbon composite material and has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal,
• wherein the seed crystal holder includes:
• a core part in which a direction of carbon fibers has isotropy as viewed from a center axis of the hollow space;
• and
• a clad part in which the direction of the carbon fibers has anisotropy as viewed from the center axis of the hollow space,
• wherein the core part is provided at least at a part contacting an outer peripheral surface of the seed crystal and in inner peripheral side regions of respective cylindrical intermediate section and cylindrical lower section, and
• wherein the clad part is provided in a cylindrical upper section, the cylindrical intermediate section positioned below the cylindrical upper section, and the cylindrical lower section.