Ceramic heater and manufacturing method for tubular shaft
AssigneeNGK Insulators, Ltd.
InventorYutaka Unno
Life of this patent
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Abstract
A ceramic heater includes a ceramic plate having a wafer placement surface on which a wafer is to be placed, and incorporating a resistance heating element therein, and a ceramic tubular shaft having one end joined to a rear surface of the plate. The tubular shaft has a vertical sectional shape including an S-like portion or a curved portion having an inflection point in at least one position, and includes a through-hole penetrating the tubular shaft from the one end to the other end with an axis extending along the vertical sectional shape of the tubular shaft.
Claims7
A ceramic heater comprising a ceramic plate having a wafer placement surface on which a wafer is to be placed, and incorporating a resistance heating element therein, and a ceramic tubular shaft having one end joined to a rear surface of the plate,
- wherein the tubular shaft has a vertical sectional shape including an S-like portion or a curved portion having an inflection point in at least one position within the curved portion, and includes a through-hole penetrating the tubular shaft from the one end to the other end with an axis extending along the vertical sectional shape of the tubular shaft.
A manufacturing method for a tubular shaft made of a ceramic, having a vertical sectional shape including an S-like portion or a curved portion having an inflection point in at least one position within the curved portion, and including a through-hole penetrating the tubular shaft from one end to the other end with an axis extending along the vertical sectional shape of the tubular shaft, the manufacturing method comprising steps of:
- (a) fabricating a compact having the same or a similar shape as or to a shape of the tubular shaft with a 3D printer by using slurry containing ceramic powder, or fabricating a compact having the same or a similar shape as or to a shape of the tubular shaft with a mold casting method by using slurry containing ceramic powder;
- and
- (b) obtaining the tubular shaft by firing the fabricated compact,
- wherein one end of the ceramic tubular shaft is joined to a rear surface of a ceramic plate of a ceramic heater having a wafer placement surface and a resistance heating element incorporated therein.
Dependencies are inferred from the claim text.