Gas field ionization source
AssigneeHitachi, Ltd.
InventorShinichi Matsubara
Life of this patent
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Abstract
A gas field ionization source for forming an electric field for ionizing gas comprises: an emitter tip having a tip end; an extraction electrode facing the emitter tip and having an aperture at a position distant therefrom; a gas supply means for supplying the gas in the vicinity of the emitter tip; a vacuum partition made of a metal having a hole; and a high voltage power source for applying voltage between the emitter tip and the extraction electrode. The hole is constructed so that the tip end of the emitter tip can pass therethrough and the vacuum partition has a micro protrusion, around the hole, protruding toward a side of the extraction electrode.
Claims10
A gas field ionization source for forming an electric field for ionizing gas, comprising:
- an emitter tip having a tip end;
- an extraction electrode facing the emitter tip and having an aperture at a position distant therefrom;
- a gas supplier for supplying the gas in the vicinity of the emitter tip;
- a vacuum partition made of a metal having a hole, the hole being constructed so that the tip end of the emitter tip can pass therethrough;
- and
- a voltage applier for applying voltage between the emitter tip and the extraction electrode,
- wherein the vacuum partition has a convex structure, around the hole, comprising a micropartition protruding toward a side of the extraction electrode in an axial direction in which an ion beam is emitted.
Dependencies are inferred from the claim text.