MEMS device including spurious mode suppression and corresponding operating method

An operating method for a MEMS device, which includes an oscillatory micromechanical system, the method comprising:

• exciting the oscillatory micromechanical system in a plurality of useful modes, wherein the oscillatory micromechanical system includes at least one system component, which is excitable in at least one parasitic spurious mode by superposing the useful modes;
• setting a resonant frequency of the system component with an adjusting device, which is configured so that it counteracts the superposition with at least one parasitic spurious mode by applying an electromagnetic interaction to the system component;
• wherein the parasitic spurious mode is ascertained during the operation by a detection unit.

An operating method for a MEMS device, which includes an oscillatory micromechanical system, the method comprising:

• exciting the oscillatory micromechanical system in a plurality of useful modes, wherein the oscillatory micromechanical system includes at least one system component, which is excitable in at least one parasitic spurious mode by superposing the useful modes;
• setting a resonant frequency of the system component with an adjusting device, which is configured so that it counteracts the superposition with at least one parasitic spurious mode by applying an electromagnetic interaction to the system component;
• wherein the parasitic spurious mode is ascertained during the operation by a detection unit, which includes at least one electrode or at least one piezoelectric layer, at least one piezoresistive layer, or at least one magnetic layer, or at least one current-conducting conductor on the at least one system component.