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US 11,362,314 B2Granted
Storage device and manufacturing method
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsArnaud Bazin, Sami Oukassi, Severine Poncet, Christophe Secouard
Life of this patent
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Abstract
An electrode, in particular for micro-batteries, produced in a plurality of layers with intermediate steps of masking a first layer leaving some parts of the latter exposed in order next to produce a removal of material eliminating defects. After removal of the masking layer, the second layer can be formed. Other layers can then follow in the same way.
Claims9
A method for producing an electrode, for an electrochemical energy storage device, wherein the electrode is obtained by formation of a plurality of stacked layers,
- said method comprising:
- i) a production of a first electrode layer by physical vapour deposition on a support, said deposition producing defects forming, in the first electrode layer, projecting reliefs;
- ii) a formation of a masking layer on the first electrode layer, configured to be sufficiently fine so as to not completely cover the reliefs, so as to cover a first portion of an exposed surface of the first electrode layer without covering a second, non-masked, portion of the exposed surface of the first electrode layer, the second portion comprising reliefs having an extension, in a thickness dimension of the electrode, greater than a maximum extension, along the thickness dimension of the electrode, of the first portion;
- iii) a removal of material of the first electrode layer by applying an etching solution to the first electrode layer as from the second portion;
- iv) an elimination of the masking layer;
- v) a production of a second electrode layer immediately on top of the exposed surface of the first electrode layer.
3 more elements
Dependencies are inferred from the claim text.