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US 11,361,931 B2Granted
Target assembly, apparatus incorporating same, and method for manufacturing same
AssigneeUih America, Inc.
InventorJonathan Maltz
Life of this patent
Estimating the term…
Abstract
A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.
Claims20
A target assembly, comprising:
- a target capable of generating first radiation when impinged by a beam;
- a substrate for supporting the target;
- a window at least partially permeable to the beam, the window and the substrate forming at least part of a hermetically sealed chamber in which the target is positioned, wherein the chamber is filled with air having a content of oxygen;
- and
- a functional plate placed underneath the target, which is configured to facilitate the first radiation generation.
2 more elements
A target assembly, comprising:
- a substrate;
- a target capable of generating radiation when impinged by a beam, wherein the target connects with the substrate;
- a window, at least partially permeable to the beam, and hermetically sealing at least a portion of the target in a chamber without vacuuming air from the chamber;
- and
- a functional plate placed underneath the target, which is configured to facilitate the first radiation generation.
2 more elements
Dependencies are inferred from the claim text.