Detector of electromagnetic radiation and in particular infrared radiation, and process for producing said detector

A method of forming an infrared radiation detector, comprising the steps of:

• installing an array of elementary imaging bolometric detectors and at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector in said cavity, each of the elementary bolometric detectors being formed of a bolometric membrane comprising a film made of amorphous vanadium oxide VOx, x being comprised between 1.8 and 2.3, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors,
• hermetically sealing said cavity with a upper cap comprising a window transparent to infrared radiation by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure;
• in which method:
• the sealing of the upper cap of the cavity thereon, after the elementary imaging bolometric detectors and the getter have been installed therein, is performed at a temperature in the range from 280° C. to 320° C. for a duration in the range from 10 to 90 minutes;
• and the activation of said getter is performed concurrently to the sealing of the upper cap of the cavity.