Method and mechanism for symmetrically controlling pressure in process chamber

An electronic device manufacturing system, comprising:

• a process chamber;
• and
• a flow control apparatus comprising a valve assembly, wherein the value assembly comprises;
• a housing comprising a flow path;
• a first flap coupled to a first shaft and a second flap coupled to a second shaft, wherein the first shaft and the second shaft are coupled to the housing;
• a first gear assembly situated outside the flow path and coupled to the first shaft and the second shaft at a first location proximate to a first end of the first shaft;
• and
• a second gear assembly situated outside the flow path and coupled to the first shaft and the second shaft at a second location on the first shaft, wherein the second location is proximate to a second end, that is opposite to the first end, on the first shaft, wherein the first gear assembly and the second gear assembly are configured such that the first flap and the second flap rotate from a first position to a second position to prevent a flow from traversing through the flow path and from the second position to the first position to allow the flow to traverse through the flow path.

A flow control apparatus comprising:

• a gas flow channel defining a gas flow path;
• a valve assembly configured to modulate gas flow in the gas flow channel, the valve assembly comprising:
• a housing comprising gas flow path;
• a first flap coupled to a first shaft and a second flap coupled to a second shaft, wherein the first shaft and the second shaft are coupled to the housing;
• a first gear assembly situated outside the gas flow path and coupled to the first shaft and the second shaft at a first location proximate to a first end of the first shaft;
• and
• a second gear assembly situated outside the gas flow path and coupled to the first shaft and the second shaft at a second location on the first shaft, wherein the second location is proximate to a second end, that is opposite to the first end, on the first shaft, wherein the first gear assembly and the second gear assembly are configured such that the first flap and the second flap rotate from a first position to a second position to prevent a flow from traversing through the gas flow path and from the second position to the first position to allow the flow to traverse through the gas flow path.

A method of manufacturing a valve assembly, the method comprising:

• providing a housing comprising a flow path;
• coupling a first flap to a first shaft;
• coupling a second flap to a second shaft;
• coupling the first shaft and the second shaft to the interior of the housing;
• and
• coupling a first gear assembly outside the flow path and to the first shaft and the second shaft at a first location proximate to a first end of the first shaft;
• and
• coupling a second gear assembly outside the flow path and to the first shaft and the second shaft at a second location on the first shaft, wherein the second location is proximate to a second end, that is opposite to the first end, on the first shaft, wherein the first gear assembly and the second gear assembly are configured such that the first flap and the second flap rotate from a first position to a second position to prevent a flow from traversing through the flow path and from the second position to the first position to allow the flow to traverse through the flow path.