Surface treatment agent, surface treatment method, and area selective deposition method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsKenji Seki, Jun Iioka, Takumi Namiki
Life of this patent
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Abstract
A surface treatment agent including a compound represented by the following general formula (P-1) and an acid. In the formula, R1 represents a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group; R2 and R3 each independently represents a hydrogen atom, a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group R1—P(═O)(OR2)(OR3) (P-1).
Claims8
A surface treatment agent comprising:
- a compound (P) represented by the following general formula (P-1),
- an acid selected from the group consisting of a carboxylic acid and an inorganic acid, provided that the compound (P) is excluded, and
- an organic solvent,
- wherein the amount of the acid with respect to the total mass of the surface treatment agent being 0.0005 to 0.5% by mass,
- wherein the surface treatment agent is used for treating a surface including two or more regions, which is made of different materials from each other with respect to adjacent regions of the two or more regions, and
- the adjacent regions of the two or more regions comprises at least one member selected from the group consisting of silicon, silicon nitride, silicon oxide, tungsten, cobalt, titanium nitride, tantalum nitride, germanium, silicon germanium, aluminum, nickel, ruthenium and copper:
- R1—P(═O)(OR2)(OR3) (P-1)
- wherein R1 represents a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group which may have a substituent;
- R2 and R3 each independently represents a hydrogen atom, a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group which may have a substituent.
A surface treatment agent comprising:
- a compound (P) represented by the following general formula (P-1), and
- an acid selected from the group consisting of a carboxylic acid, HF, HP(═O)(OH)2, hydrochloric acid, nitric acid and boric acid:
- R1—P(═O)(OR2)(OR3) (P-1)
- wherein R1 represents a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group which may have a substituent;
- R2 and R3 each independently represents a hydrogen atom, a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group which may have a substituent.
Dependencies are inferred from the claim text.