# US 11,353,414 B2 · Analysis device and spectrum generation method

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- Number: US 11,353,414 B2
- Document ID: US11353414B2
- Status: Granted
- Kind: B2
- Application number: 16/810,133
- Filed: 2020-03-05
- Published: 2020-09-10
- Granted: 2022-06-07
- Earliest claimed: 2019-03-08
- Assignees: JEOL Ltd.
- Applicants: JEOL Ltd.
- Inventors: Takanori Murano
- Web page: https://patentgrep.com/patent/US11353414B2

## CPC

- G01N 23/2252: Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
- G01N 23/2076: {for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS}
- G01N 23/2209: using wavelength dispersive spectroscopy [WDS]
- G01N 2223/076: X-ray fluorescence
- G01N 2223/079: incident electron beam and measuring excited X-rays
- H01J 2237/24425: Wavelength-dispersive spectrometer
- H01J 2237/2445: Photon detectors for X-rays, light, e.g. photomultipliers
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

An analysis device includes a spectroscopic element that diffracts a signal generated by a specimen, a detector that detects the signal diffracted by the spectroscopic element, and a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector, the detector including detection regions arranged in a plurality of rows and a plurality of columns, a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and the spectrum generation unit performing: processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction; and processing for generating a spectrum of the signal based on the plurality of row spectra.

## Claims

### Claim 1

An analysis device comprising:
a spectroscopic element that diffracts a signal generated by a specimen;
a detector that detects the signal diffracted by the spectroscopic element; and
a spectrum generation unit that generates a spectrum of the signal based on a detection result by the detector,
the detector including detection regions arranged in a plurality of rows and a plurality of columns,
a divergent direction of the signal incident on the detector being neither parallel nor perpendicular to a column direction of the detector, and
the spectrum generation unit performing:
processing for acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction of the detector; and
processing for generating a spectrum of the signal based on the plurality of row spectra, wherein energy axes of the plurality of row spectra are corrected so that positions of corresponding peaks on the plurality of row spectra have identical energy values, and wherein the spectrum of the signal is generated by plotting a plurality of points constituting the plurality of row spectra having the corrected energy axes on a single graph.

### Claim 2 (depends on 1)

The analysis device according to claim 1, wherein,
an angle θ formed by the divergent direction and the column direction is θ=tan−1 (1/N), where N denotes the number of the detection regions arranged in the column direction.

### Claim 3 (depends on 1)

The analysis device according to claim 1, wherein the signal is an X-ray.

### Claim 4

A spectrum generation method executed in an analysis device including a spectroscopic element that diffracts a signal generated by a specimen, and a detector in which detection regions used to detect the signal diffracted by the spectroscopic element are arranged in a plurality of rows and a plurality of columns,
the spectrum generation method comprising:
acquiring a plurality of row spectra by generating a row spectrum for each of the plurality of rows based on detection signals relating to the detection regions arranged in a row direction of the detector; and
generating a spectrum of the signal based on the plurality of row spectra,
wherein a divergent direction of the signal incident on the detector is neither parallel nor perpendicular to a column direction of the detector, wherein energy axes of the plurality of row spectra are corrected so that positions of corresponding peaks on the plurality of row spectra have identical energy values, and wherein the spectrum of the signal is generated by plotting points constituting the plurality of row spectra having the corrected energy axes on a single graph.

### Claim 5 (depends on 4)

The spectrum generation method according to claim 4, wherein
an angle θ formed by the divergent direction and the column direction is θ=tan−1 (1/N), where N denotes the number of the detection regions arranged in the column direction.