Process for the production of organohydridochlorosilanes

A process for the manufacture of monosilanes of the general formula (I):

• RxSiHyClz (I),
• wherein R is an organyl group which is selected from the groups consisting of:
• alkyl, aryl, alkenyl, alkynyl, alkaryl, aralkyl, aralkenyl, aralkynyl, cycloalkyl, cycloalkenyl, cycloalkynyl, cycloaralkyl, cycloaralkenyl, and cycloaralkynyl,
• x=1 to 3,
• y=1 to 3,
• z=0 to 3, and
• x+y+z=4,
• comprising:
• A) the step of subjecting a silane substrate comprising one or more silanes, selected from the group consisting of:
• a) monosilanes of the general formula (II)
• RaSiHbClc (II)
• wherein R is as defined above,
• a=1 to 3,
• b=0 to 3,
• c=0 to 3 and
• a+b+c=4, and
• b) disilanes of the general formula (III)
• ReSi2HfClg (III)
• wherein R is as defined above,
• e=1 to 5,
• f=0 to 5,
• g=0 to 5 and
• e+f+g=6,
• c) carbodisilanes of the general formula (IV)
• Rm(SiCH2Si)HnClo (IV)
• wherein R is as defined above,
• m=1 to 5,
• n=0 to 5,
• o=0 to 5 and
• m+n+o=6
• to a reaction
• in the presence of one or more compounds (C) selected from the group consisting of:
• phosphanes R13P, wherein R1 is hydrogen or an organyl group as defined and can be the same or different, and
• amines R13N, wherein R1 is hydrogen or an organyl group as defined and can be the same or different,
• wherein the process for the manufacture of monosilanes is carried out without supply of hydrogen chloride and in the absence of AlCl3 and
• B) optionally a step of separating the resulting monosilanes of the general formula (I),
• with the provisos
• (i) at least one silane of the formula (II), (III) or (IV) has at least one chlorine substituent at the silicon atom,
• and at least one of the following provisos (ii) and (iii):
• (ii) at least one of the silane of the formula (II), (III) or (IV) has at least one hydrido substituent at the silicon atom, and
• (iii) step A) is carried out in the presence of one or more hydride donors.