Operating a particle beam apparatus and/or a light microscope

A computer program product comprising a program code which is loadable into a processor and which, when executed, controls a particle beam apparatus and/or a light microscope in such a way that a method of operating the particle beam apparatus and/or the light microscope for imaging, analyzing and/or processing an object is carried out, the method including:

• changing a first temperature of the object wherein the object is arranged on an object receiving device rendered movable by at least one motor operated by a supply current, wherein changing the first temperature of the object brings about a change in a second temperature of the object receiving device from a first temperature value of the object receiving device to a second temperature value of the object receiving device;
• changing the supply current of the motor from a first current value to a second current value, wherein, both at the first current value and the second current value, the supply current is used to hold the object receiving device by means of the motor at a position in the particle beam apparatus and/or in the light microscope;
• and
• changing the second temperature of the object receiving device from the second temperature value of the object receiving device to a third temperature value of the object receiving device on account of heat generated by the motor, which is obtained by the second current value of the supply current and fed to the object receiving device, wherein the third temperature value of the object receiving device is located in a temperature range to which the following applies:
• TOT1−15° C.≤TOT3≤TOT1+15° C.,
• where TOT1 is the first temperature value of the object receiving device, and where TOT3 is the third temperature value of the object receiving device.

A particle beam apparatus for imaging, analyzing and/or processing an object, comprising:

• at least one beam generator for generating a particle beam with charged particles;
• at least one objective lens for focusing the particle beam onto the object;
• at least one scanning device for scanning the particle beam over the object;
• at least one object holder for holding the object;
• at least one cooling and/or heating device for changing a temperature of the object holder and/or of the object;
• at least one movably embodied object receiving device, on which the object holder is arranged;
• at least one motor for moving the object receiving device;
• at least one power supply unit for supplying the motor with a supply current;
• at least one detector for detecting interaction particles and/or interaction radiation, which result/results from an interaction of the particle beam with the object;
• at least one display device for displaying the image and/or a result of the analysis of the object;
• and
• at least one control unit with a processor, onto which a computer program product is loaded, the computer program product comprising a program code which is loadable into a processor and which, when executed, controls the particle beam apparatus in such a way that a method of operating the particle beam apparatus for imaging, analyzing and/or processing an object is carried out, the method including:
• changing a first temperature of the object wherein the object is arranged on an object receiving device rendered movable by at least one motor operated by a supply current, wherein changing the first temperature of the object brings about a change in a second temperature of the object receiving device from a first temperature value of the object receiving device to a second temperature value of the object receiving device,
• changing the supply current of the motor from a first current value to a second current value, wherein, both at the first current value and the second current value, the supply current is used to hold the object receiving device by means of the motor at a position in the particle beam apparatus, and
• changing the second temperature of the object receiving device from the second temperature value of the object receiving device to a third temperature value of the object receiving device on account of heat generated by the motor, which is obtained by the second current value of the supply current and fed to the object receiving device, wherein the third temperature value of the object receiving device is located in a temperature range to which the following applies:
• TOT1−15° C.≤TOT3≤TOT1+15° C.,
• where TOT1 is the first temperature value of the object receiving device, and where TOT3 is the third temperature value of the object receiving device.

A light microscope for imaging, analyzing and/or processing an object, comprising:

• at least one light source for generating light;
• at least one optical unit for guiding the light to the object;
• at least one object holder for holding the object;
• at least one cooling and/or heating device for changing a temperature of the object holder and/or of the object;
• at least one movably embodied object receiving device, on which the object holder is arranged;
• at least one motor for moving the object receiving device;
• at least one power supply unit for supplying the motor with a supply current;
• and
• a control unit which comprises a processor, onto which a computer program product is loaded, the computer program product comprising a program code which is loadable into a processor and which, when executed, controls the light microscope in such a way that a method of operating the light microscope for imaging, analyzing and/or processing an object is carried out, the method including:
• changing a first temperature of the object wherein the object is arranged on an object receiving device rendered movable by at least one motor operated by a supply current, wherein changing the first temperature of the object brings about a change in a second temperature of the object receiving device from a first temperature value of the object receiving device to a second temperature value of the object receiving device,
• changing the supply current of the motor from a first current value to a second current value, wherein, both at the first current value and the second current value, the supply current is used to hold the object receiving device by means of the motor at a position in the light microscope, and
• changing the second temperature of the object receiving device from the second temperature value of the object receiving device to a third temperature value of the object receiving device on account of heat generated by the motor, which is obtained by the second current value of the supply current and fed to the object receiving device, wherein the third temperature value of the object receiving device is located in a temperature range to which the following applies:
• TOT1−15° C.≤TOT3≤TOT1+15° C.,
• where TOT1 is the first temperature value of the object receiving device, and where TOT3 is the third temperature value of the object receiving device.