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US 11,346,767 B2Granted
Detector cell for a photoacoustic gas sensor and photoacoustic gas sensor
AssigneeInfineon Technologies AG
InventorsTobias Mittereder, Christoph Glacer
Life of this patent
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Abstract
A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.
Claims26
A detector cell for a photoacoustic gas sensor comprising:
- a first layer structure;
- a second layer structure arranged at the first layer structure and comprising a membrane structure;
- and
- a third layer structure arranged at the second layer structure;
- wherein the first layer structure and the third layer structure hermetically enclose a cavity and wherein the membrane structure is arranged in the cavity,
- wherein a first sub-cavity of the cavity at a first side of the membrane structure and a second sub-cavity of the cavity at a second side of the membrane structure are sealed from each other and comprise different gasses or gas concentrations.
3 more elements
A method for manufacturing a detector cell, the method comprising:
- providing a first layer structure;
- attaching a second layer structure having a membrane structure at the first layer structure;
- and
- attaching a third layer structure at the second layer structure;
- such that the first layer structure and the third layer structure hermetically enclose a cavity and such that the membrane structure is arranged in the cavity,
- wherein a first sub-cavity of the cavity at a first side of the membrane structure and a second sub-cavity of the cavity at a second side of the membrane structure are sealed from each other and comprise different gasses or gas concentrations.
3 more elements
Dependencies are inferred from the claim text.