Polycrystalline silicon bar, polycrystalline silicon rod, and manufacturing method thereof
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaruhiro Hoshino, Tetsuro Okada, Masahiko Ishida
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Abstract
In a step of performing cylindrical grinding of a polycrystalline silicon bar 10 grown by a Siemens method, this cylindrical grinding step is performed such that a polycrystalline silicon rod 30, whose center axis CR is shifted from a center axis C0 of a silicon core wire 20 by 2 mm or more, is manufactured.
Claims12
A polycrystalline silicon bar grown by the Siemens method and subjected to cylindrical grinding wherein a center axis of a silicon core wire is located 2 mm or more from the center axis of the a polycrystalline silicon bar.
A polycrystalline silicon rod grown by the Siemens method and subjected to cylindrical grinding wherein a center axis of a silicon core wire is located 2 mm or more from the center axis of the a polycrystalline silicon rod.
A manufacturing method of a polycrystalline silicon rod comprising a step of performing cylindrical grinding of a polycrystalline silicon bar grown by a Siemens method, wherein the cylindrical grinding step is performed such that a center axis of a silicon core wire is located 2 mm or more from the center axis of the a polycrystalline silicon bar.
Dependencies are inferred from the claim text.