Rigid-flexible coupling high-accuracy galvo scanning motor and control method thereof

A rigid-flexible coupling high-accuracy galvo scanning motor, comprising:

• a stator, a rotor rotating relative to the stator, bearing seats and at least two groups of encoders, wherein
• the rotor comprises:
• a rotating shaft, rigid-flexible coupling bearings and a plurality of magnets;
• the plurality of magnets are pasted on the rotating shaft in a form of alternate polarity;
• the rigid-flexible coupling bearings are installed on the rotating shaft;
• the bearing seats are used for positioning the rotor in the stator through the rigid-flexible coupling bearings;
• each of the rigid-flexible coupling bearings comprises:
• a rigid bearing and a flexible hinge ring which is elastically deformable, and the flexible hinge ring is fixed in an inner ring of the rigid bearing;
• the at least two groups of encoders comprise:
• a first group of encoders and a second group of encoders;
• the first group of encoders is used to measure a rotation angle of the rotating shaft;
• and
• the second group of encoders is used to measure a rotation angle of the inner ring of the rigid bearing.