Substrate case and substrate accommodation apparatus
AssigneeNikon Corporation
InventorsHideo Mizutani, Tohru Kiuchi, Toru Kawaguchi, Takashi Masukawa
Life of this patent
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Abstract
A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.
Claims6
A substrate accommodation apparatus in which a flexible sheet substrate on which a circuit area is formed is wound in a cylindrical shape and is accommodated in a substrate case, wherein the substrate case is constituted of:
- a shaft portion around which the sheet substrate is wound;
- a shaft holding portion that holds the shaft portion;
- and a cover portion that covers around the sheet substrate which is wound around the shaft portion and that is openable and closable for accommodation or separation of the shaft portion, the substrate accommodation apparatus comprising:
- a transportation mechanism that transports the sheet substrate such that a front end of the sheet substrate is fixed to a specific portion in a circumferential direction of the shaft portion;
- a rotation driving mechanism that rotates the shaft portion and rolls up the sheet substrate in a state where the front end of the sheet substrate is fixed to the shaft portion;
- a cover opening and closing mechanism that opens and closes the cover portion at a cover holding portion that holds the cover portion;
- and
- a case transportation mechanism that transports the shaft portion around which the sheet substrate is wound from the rotation driving mechanism to the cover holding portion and that accommodates the shaft portion in the cover portion in an open state.
Dependencies are inferred from the claim text.