Testing device
AssigneeTokyo Electron Limited
InventorsShigeru Kasai, Masahito Kobayashi
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AssigneeTokyo Electron Limited
InventorsShigeru Kasai, Masahito Kobayashi
Estimating the term…
A testing device for inspecting an electronic device by causing contact terminals to electrically contact the electronic device, includes: a mounting table formed with a light transmission member opposite the side on which a inspection object is placed and having therein a coolant flow path through which a coolant capable of transmitting light flows; a light irradiation mechanism disposed so as to face the surface opposite the inspection object placement side of the mounting table, and having LEDs pointing toward the inspection object; and a controller controlling absorption of heat by the coolant and heating by the lights from the LEDs to control the temperature of the electronic device to be inspected. The controller controls the light output from the LEDs based on the measured temperature of the electronic device to be inspected and controls the absorption of heat by the coolant based on the LED light output.
A testing device that brings a contact terminal into electrical contact with an electronic device formed on an inspection object so as to inspect the electronic device, the testing device comprising:
Dependencies are inferred from the claim text.