Multi-hole probe pressure sensors
AssigneeUniversity of Florida Research Foundation, Inc.
InventorsHaocheng Zhou, Mark Sheplak
Life of this patent
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Abstract
Systems, methods, and apparatuses for taking pressure measurements are provided. A multi-hole pressure sensor probe can include a probe tip having a plurality of probe tip holes. The probe tip holes can lead to probe tip channels that convey fluid from the measurement environment to pressure transducers. The pressure transducers can operate using optical transduction techniques. A light source can be applied to the diaphragm, and the light reflected from the diaphragm changes as the position of the diaphragm changes. Further, a reflective material can be applied on the backside of the diaphragm to increase its reflective properties. The light can then be collected and analyzed using a photodiode to determine the environmental pressure acting on the different holes of the probe.
Claims32
A multi-hole probe pressure sensor, comprising:
- a probe tip comprising a plurality of probe tip holes on a top surface connected to a plurality of probe tip tubes each having a length and penetrating a depth of the probe tip, wherein each of the probe tip tubes comprises a surface-proximate portion and a surface-distant portion, and wherein the surface-proximate portion has a smaller diameter than the surface-distant portion such that each probe tip tube defines a Helmholtz resonator;
- a plurality of die channels containing optical fibers to transmit electromagnetic (EM) waves;
- and
- a sensor die, arranged at a bottom surface of the probe tip, comprising a plurality of transducers each transducer corresponding to a respective one of the plurality of probe tip tubes and each transducer comprising a diaphragm positioned over and spanning across a cavity, wherein the diaphragm is centrally aligned with and connects to the respective one of the probe tip tubes, and wherein the cavity encloses one of the plurality of die channels;
- wherein a deflection of the diaphragm triggers a signal change in the EM waves.
A multi-hole probe pressure sensor, comprising:
- a multi-fiber ferrule including a plurality of die channels, each enclosing optical fibers to transmit EM waves;
- a sensor die comprising a plurality of transducers attached to the multi-fiber ferrule, wherein each of the plurality of transducers corresponds to a respective one of the plurality of probe tip tubes and each comprising a diaphragm positioned over and spanning across a cavity;
- and
- a probe tip including a plurality of probe tip tubes inside the tip and attaching to the sensor die;
- wherein each of the plurality of transducers connects to one of the plurality of probe tip tubes and one of the plurality of die channels;
- and
- wherein each of the plurality of probe tip tubes comprises a surface-proximate portion and a surface-distant portion, wherein the surface-proximate portion has a smaller diameter than the surface-distant portion such that each probe tip tube defines a Helmholtz resonator.
Dependencies are inferred from the claim text.