Heated shield for physical vapor deposition chamber
AssigneeApplied Materials, Inc.
InventorsIlya Lavitsky, Keith A Miller, Goichi Yoshidome
Life of this patent
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Abstract
Embodiments of a process shield for use in a process chamber are provided herein. In some embodiments, a process shield for use in a process chamber includes a body having a cylindrical shape, wherein the body includes an upper portion and a lower portion, the upper portion having an outer lip and the lower portion extending downward and radially inward from the upper portion, wherein the outer lip includes a plurality of openings to accommodate fasteners, a plurality of alignment slots extending radially inward from an outer surface of the outer lip, and a notched lower peripheral edge, and wherein a lower surface of the outer lip includes a plurality of grooves.
Claims20
A process shield for use in a process chamber, comprising:
- a body having a cylindrical shape, wherein the body includes an upper portion and a lower portion, the upper portion having an outer lip and the lower portion extending downward and radially inward from the upper portion, wherein the outer lip includes a plurality of openings to accommodate fasteners, a plurality of alignment slots extending radially inward from an outer surface of the outer lip, and a notched lower peripheral edge, and wherein a lower surface of the outer lip includes a plurality of grooves.
A process kit for use in a process chamber, comprising:
- a process shield having a cylindrical body with an upper portion and a lower portion, the upper portion having an outer lip and the lower portion extending downward and radially inward from the upper portion, wherein a plurality of alignment slots extend radially inward from an outer surface of the outer lip;
- and
- a heater ring coupled to the upper portion of the process shield via a plurality of openings in the outer lip, wherein the heater ring includes a resistive heating element embedded therein, and wherein the heater ring includes a plurality of pin slots corresponding with a location of the plurality of alignment slots of the process shield.
A process chamber, comprising:
- a chamber body defining an interior volume therein;
- a target disposed in the interior volume proximate a top of the chamber body;
- a substrate support disposed in the interior volume opposite the target;
- a shield having a cylindrical body that extends from the target to the substrate support, the shield having an outer lip;
- an adapter surrounding the shield, the adapter having a cooling channel disposed therein;
- and
- a heater ring coupled to the outer lip of the shield via a plurality of fasteners disposed through a plurality of openings in the outer lip and extending into the heater ring to clamp the adapter between the outer lip and the heater ring.
Dependencies are inferred from the claim text.