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AssigneeEntegris, Inc.
InventorsJohn Leys, James C. Linder, Jeffrey James McKenzie, Barry Lee Gregerson, Brett Christopher Reichow
Estimating the term…
A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each tubing segment includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of each of the respective tubing segments. Each operative component includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit, wherein each of the tubing connector fittings conductively connect the respective conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.
A fluid circuit for a predetermined fluid flow passageway having at least one inlet and at least one outlet, the fluid circuit comprising:
A fluid circuit defining a flow passageway for a fluid from a fluid supply toward a process stage, the fluid circuit comprising:
A method of making an electrostatic discharge mitigation fluid circuit for a predetermined fluid flow passageway, having at least one inlet and at least one outlet comprising:
Dependencies are inferred from the claim text.