Polyorganosiloxane-based stamp manufacturing method, polyorganosiloxane-based stamp, use of the same for a printing process, and an imprinting method using the same

A method of manufacturing a polyorganosiloxane based stamp, the method comprising:

• forming a first layer of a first curable composition onto a transfer pattern surface of a master such that the first layer includes a relief pattern of the transfer pattern surface, the first layer having a first thickness, the first curable composition comprising:
• reactive branched polyorganosiloxane,
• a first reactive linear polyorganosiloxane, and
• a first concentration of a catalyst, wherein the first concentration of the catalyst is arranged to catalyze crosslinking of the reactive branched polyorganosiloxane and the first reactive linear polyorganosiloxane;
• partially curing the first layer;
• depositing a second layer of a second curable composition onto the partially cured first layer, the second layer having a second thickness, the second curable composition comprising:
• a second concentration of the catalyst, and
• a second reactive linear polyorganosiloxane, wherein the second reactive linear polyorganosiloxane is arranged to adhere the second layer to the first layer by crosslinking with the crosslinked reactive branched and linear polyorganosiloxanes of the partially cured first layer,
• wherein the second thickness is selected to be smaller than the first thickness and the second concentration is selected to be equal to or greater than the first concentration;
• completely co-curing the partially cured first layer and the second layer to form a cured first layer adhered to a cured second layer,
• wherein the cured first layer has a first Young's modulus,
• wherein the cured second layer has a second Young's modulus,
• wherein the second Young's modulus is smaller than the first Young's modulus;
• depositing a third layer of a third curable composition onto the cured second layer, the third curable composition comprising:
• a third reactive polyorganosiloxane, wherein the third reactive polyorganosiloxane is arranged to adhere the third layer to the cured second layer by crosslinking with the second reactive linear polyorganosiloxane;
• and
• curing the third layer to form a cured third layer adhered to the cured second layer.