Systems and methods for continuously supplying negative ions using multi-pulsed plasma sources

A system for supplying negative ions using multi-pulsed plasma sources, the system comprising:

• a plurality of plasma generators each configured to generate plasma by applying pulsed power to electronegative gas;
• a negative ion supply unit connected to each of the plurality of plasma generators to receive the generated plasma therefrom;
• and
• a controller connected to the plurality of plasma generators and configured to control characteristics of the pulsed powers supplied to the respective plasma generators, and to adjust phase shift between signals associated with pulsed power envelopes such that when one of the plasma generators is in an active-glow state, another plasma generator is switched to an after-glow state,
• wherein the plurality of plasma generators generates the plasmas in an alternating manner depending on the phase shift between the signals associated with pulsed power envelopes in a manner that a decreased amount of negative ion supply from one of the plasma generators in the active-glow state to the negative ion supply unit is compensated for by an additional supply of negative ions supplied from another plasma generator in the after-glow state to the negative ion supply unit.