Mechanical connection for a MEMS and NEMS device for measuring a variation in pressure, and device comprising such a mechanical connection

A mechanical connection for a microelectromechanical and/or nanoelectromechanical device for measuring a variation in pressure, the device comprising a fixed component extending in a main plane (OXY), a mobile component able to move or to deform in an out-of-plane direction under the effect of a variation in pressure, and detection means for detecting movement or deformation comprising at least one mobile element, the mechanical connection comprising:

• a lever arm;
• a first connection connecting the mobile component to a first end of the lever arm, the first connection being designed to transmit the out-of-plane movement of the mobile component to the first end of the lever arm while allowing the out-of-plane rotation of the lever arm about a direction of rotation;
• a second connection connected to the second end of the lever arm and fixed to the fixed component to allow mainly an out-of-plane rotation of the lever arm about an axis of rotation extending in the direction of rotation;
• a third connection connecting the lever arm to the detection means at a given distance from the axis of rotation in the out-of-plane direction, the third connection being designed to allow a rotation about an axis of bending which follows the same direction as the axis of rotation but which is offset by the distance in the out-of-plane direction from the axis of rotation, so as to convert the rotation of the lever arm about the axis of rotation into a translation in the plane (OXY) of the at least one mobile element in a direction of translation.