Method for detecting defects in ultra-high resolution panels

A system for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the system comprising:

• a sensor operative to sense at least one characteristic of a test region defined thereby with respect to said electrical circuits, wherein said sensor is configured to measure an overall superimposition of electrical fields produced by a plurality of conductors, and wherein said sensor comprises an electro-optic modulator;
• a voltage driver operative to apply different electrical voltages to said plurality of conductors from among said multiplicity of conductors, wherein said plurality of conductors are in spatial propinquity to each other, said voltage driver selecting said different electrical voltages such that the overall superimposition of electrical fields at said test region is zero in the absence of defects in said plurality of conductors, wherein said plurality of conductors are mutually spaced and generally parallel, and wherein said voltage driver simultaneously applies said different electrical voltages to alternating ones of said generally parallel conductors;
• and
• a defect indicator responsive to an output of said sensor for ascertaining whether a defect exists in said plurality of conductors.

A method for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the method comprising:

• applying different electrical voltages to a plurality of conductors from among said multiplicity of conductors, wherein said plurality of conductors are in spatial propinquity to each other, wherein said plurality of conductors are mutually spaced and generally parallel, and wherein said different electrical voltages are simultaneously applied to alternating ones of said generally parallel conductors;
• sensing at least one characteristic of a test region defined thereby with respect to said electrical circuits, said sensing utilizing a sensor with an electro-optic modulator lacking sufficient spatial resolution to distinguish between locations of individual ones of said plurality of conductors, wherein said sensing is configured to measure an overall superimposition of electrical fields produced by the plurality of conductors;
• and
• ascertaining, responsive to said sensing, whether a defect exists in said plurality of conductors.

A method for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the method comprising:

• applying different electrical voltages to a plurality of conductors from among said multiplicity of conductors, wherein said plurality of conductors are in spatial propinquity to each other;
• selecting said different electrical voltages such that an overall superimposition of electrical fields at said test region is zero in the absence of defects in said plurality of conductors and non-zero in the presence of defects in said plurality of conductors, wherein said plurality of conductors are mutually spaced and generally parallel, and wherein said different electrical voltages are simultaneously applied to alternating ones of said generally parallel conductors;
• sensing at least one characteristic of a test region defined thereby with respect to said electrical circuits, wherein said sensing is configured to measure the overall superimposition of electrical fields produced by the plurality of conductors, and wherein said sensing uses an electro-optic modulator;
• and
• ascertaining, responsive to said sensing, whether a defect exists in said plurality of conductors.