Device and method for electron transfer from a sample to an energy analyzer and electron spectrometer device
AssigneeSPECS Surface Nano Analysis GmbH
InventorsGerd Schoenhense, Thorsten Kampen, Sven Maehl, Oliver Schaff
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Abstract
An electron imaging apparatus 100 is disclosed, which is configured for an electron transfer along an electron-optical axis OA of an electron 2 emitting sample 1 to an energy analyzer apparatus 200, and comprises a sample-side first lens group 10, an analyzer-side second lens group 30 and a deflector device 20, configured to deflect the electrons 2 in an exit plane of the electron imaging apparatus 100 in a deflection direction perpendicular to the electron-optical axis OA. An electron spectrometer apparatus, an electron transfer method and an electron spectrometry method are also described.
Claims29
An electron imaging apparatus that is configured for an electron transfer along an electron-optical axis from a sample emitting electrons to an energy analyzer apparatus and comprises a first lens group on a sample side and a second lens group on an analyzer side and a deflector device that is configured to deflect the electrons in an exit plane of the electron imaging apparatus in a deflection direction perpendicular to the electron-optical axis, wherein:
- the first lens group provides a first reciprocal plane inside the first lens group and a first Gaussian plane between the first and the second lens group and is configured to generate a first momentum distribution image of a momentum distribution of electrons from the sample in the first reciprocal plane and to generate a first Gaussian image of the sample in the first Gaussian plane,
- the second lens group provides a second reciprocal plane on the analyzer side of the second lens group and is configured to generate a second momentum distribution image of the momentum distribution of the electrons from the sample in the second reciprocal plane, and
- the first lens group is configured to generate the first Gaussian image in a front focal plane of the second lens group with such a small dimension that the second momentum distribution image generated by the second lens group is a parallel image.
An electron transfer method, wherein electrons from a sample are transferred by an electron imaging apparatus along an electron-optical axis to an energy analyzer apparatus, wherein the electrons pass in sequence through a sample-side first lens group and an analyzer-side second lens group and the electrons are deflected by a deflector device in an exit plane of the electron imaging apparatus in a deflection direction perpendicular to the electron-optical axis, wherein:
- the first lens group forms a first reciprocal plane inside the first lens group and a first Gaussian plane between the first and the second lens group and generates a first momentum distribution image of a momentum distribution of electrons from the sample in the first reciprocal plane and a first Gaussian image of the sample in the first Gaussian plane,
- the second lens group forms a second reciprocal plane on the analyzer side of the second lens group and generates a second momentum distribution image of the momentum distribution of the electrons from the sample in the second reciprocal plane, and
- the first lens group generates the first Gaussian image in a front focal plane of the second lens group with such a small dimension that the second momentum distribution image generated by the second lens group is a parallel image.
Dependencies are inferred from the claim text.