Miniature electric field detector

An electric field transduction method comprising:

• generating an electric charge distribution on a proof mass, the proof mass being suspended above a substrate offset space in a substrate relative to a first sense electrode disposed on the substrate, the proof mass and at least one support suspending the proof mass above the substrate offset space being defined in a structure wafer including a flexure layer, a handle layer and a metallic layer disposed in one or more holes defined in the flexure layer electrically coupling the flexure layer and the handle layer;
• measuring a change in capacitance between the first sense electrode and the proof mass from torsional movement of the proof mass in response to receiving an electric field at the proof mass;
• and
• determining a characteristic of the electric field based on the measured change in capacitance.

A method for fabricating an electric field detector comprising:

• defining at least one substrate offset space in a substrate wafer;
• forming a first sense electrode on the substrate wafer and within the substrate offset space;
• providing a structure wafer, wherein the structure wafer includes a flexure layer and a handle layer;
• applying a metallic layer to one or more holes defined in the flexure layer to electrically couple the flexure layer and the handle layer of the structure wafer;
• defining a proof mass and at least one support in the structure wafer and suspending the proof mass by the at least one support to allow torsional movement of the proof mass;
• providing a source of concentrated charge on the proof mass;
• and
• coupling the substrate wafer and the structure wafer to position the proof mass proximate the substrate offset space of the substrate wafer and within capacitive communication with at least the first sense electrode.