Light source apparatus, illumination apparatus, exposure apparatus, and method for manufacturing object

A method for manufacturing an object, the method comprising:

• exposing a substrate with use of an exposure apparatus;
• developing the exposed substrate;
• and
• acquiring the object from the developed substrate,
• wherein the exposure apparatus includes
• an illumination apparatus including a light source apparatus, a condenser lens having positive power, and an optical integrator, the illumination apparatus being configured to illuminate a mask, the light source apparatus including an LED array and a controller, the LED array including a plurality of subunits,
• wherein a first subunit includes a plurality of LED chips arranged on a substrate at a first angle and a second subunit includes a plurality of LED chips arranged on a substrate at a second angle different form the first angle, and
• wherein the controller controls the first subunit and the second subunit to differentiate the intensity of light emitted from the first subunit and the intensity of the light emitted from the second subunit, thereby changing a light intensity distribution that the plurality of LED chips forms on a predetermined surface.