Surface modification device

A surface modification device, configured to supply substitution gas to a discharge area that is formed between a discharge electrode, which has a length in a width direction of a base material and includes one or more electrode members, and a counter electrode facing the discharge electrode, in order for a surface of the base material to be treated by discharge energy, the surface modification device comprising:

• a substitution gas passage that allows the substitution gas to be injected toward the discharge area along the discharge electrode;
• a cover member that includes an insulating material located along the discharge electrode and maintaining a facing gap from the discharge electrode;
• a gas curtain passage of a slit shape that is formed by the facing gap between the cover member and the discharge electrode;
• a support member that is held between the discharge electrode and the cover member and has a gas guide hole formed therein to communicate with the gas curtain passage;
• and
• a holder that clamps the cover member, the support member, and the discharge electrode
• wherein
• the cover member, the discharge electrode and the support member are clamped by the holder,
• the cover member is mounted either any one or both of an upstream side and a downstream side of the discharge electrode with respect to a moving direction of the base material entering the discharge area formed between the discharge electrode and the counter electrode, and
• the gas curtain passage is supplied with curtain gas through the gas guide hole.