# US 11,309,864 B2 · Piezoelectric resonator unit and method for manufacturing the piezoelectric resonator unit

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- Number: US 11,309,864 B2
- Document ID: US11309864B2
- Status: Granted
- Kind: B2
- Application number: 16/807,403
- Filed: 2020-03-03
- Published: 2020-07-09
- Granted: 2022-04-19
- Earliest claimed: 2017-09-22
- Assignees: Murata Manufacturing Co., Ltd.
- Applicants: Murata Manufacturing Co., Ltd.
- Inventors: Hiroshi Ibaragi; Ryuichi Kawai
- Web page: https://patentgrep.com/patent/US11309864B2

## CPC

- H03H 9/1021: {the BAW device being of the cantilever type}
- H03H 3/02: for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence)
- H03H 9/02102: {of temperature influence (cutting angles H03H9/02015)}
- H03H 9/02133: {of stress}
- H03H 9/0509: {consisting of adhesive elements}
- H03H 9/0519: {for cantilever (H03H9/1021 takes precedence)}
- H03H 9/19: consisting of quartz
- H10W 76/10: Containers or parts thereof
- H03H 2003/022: {the resonators or networks being of the cantilever type}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A quartz crystal resonator unit that includes a quartz crystal resonator, a lid member and a base member defining an internal space that accommodates the quartz crystal resonator, and a sealing frame and a joining material joining the lid member and the base member to each other. In a plan view of a principal surface of the base member, the sealing frame and the joining material have a frame shape surrounding the quartz crystal resonator, and the frame shape has a uniform width.

## Claims

### Claim 1

A piezoelectric resonator unit comprising:
a piezoelectric resonator;
a lid member and a base member defining an internal space that accommodates the piezoelectric resonator; and
a joining member joining the lid member and the base member,
wherein in a plan view of a principal surface of the base member, the joining member has a frame shape with a uniform width dimension surrounding the piezoelectric resonator,
wherein the frame shape is a rectangular shape including sides and corners, and in the plan view of the principal surface of the base member, a width dimension of the sides is equal to a width dimension of the corners,
wherein the corners each include a linear portion having a same width dimension as the sides in the plan view of the principal surface of the base member, a first curve connecting a first side of the sides to the linear portion, and a second curve connecting a second side of the sides to the linear portion;
the first curve and the second curve each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
a difference between the first radius and the second radius is equal to the width dimension of the linear portion in the plan view of the principal surface of the base member.

### Claim 2 (depends on 1)

The piezoelectric resonator unit according to Claim 1, wherein the lid member and the joining member are each made of a metal material.

### Claim 3 (depends on 1)

The piezoelectric resonator unit according to Claim 1, wherein the corners each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
in the plan view of the principal surface of the base member, a difference between the first radius and the second radius is equal to the width dimension of the sides.

### Claim 4 (depends on 1)

The piezoelectric resonator unit according to claim 1, wherein the base member includes respective grooves adjacent to each of the corners.

### Claim 5 (depends on 1)

The piezoelectric resonator unit according to claim 1, wherein the joining member includes:
a sealing frame in the frame shape on the principal surface of the base member and disposed along an entire circumference of the lid member; and
a joining material in the frame shape on the sealing frame.

### Claim 6 (depends on 5)

The piezoelectric resonator unit according to claim 5, wherein the frame shape is a rectangular shape including sides and corners; and
in the plan view of the principal surface of the base member, a width dimension of the sides is equal to a width dimension of the corners.

### Claim 7 (depends on 6)

The piezoelectric resonator unit according to claim 6, wherein the corners each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
in the plan view of the principal surface of the base member, a difference between the first radius and the second radius is equal to the width dimension of the sides.

### Claim 8 (depends on 6)

The piezoelectric resonator unit according to claim 6, wherein the base member includes respective grooves adjacent to each of the corners.

### Claim 9

A piezoelectric resonator unit comprising:
a piezoelectric resonator;
a lid member and a base member defining an internal space that accommodates the piezoelectric resonator; and
a joining member joining the lid member and the base member,
wherein in a plan view of a principal surface of the base member, the joining member has a frame shape with a uniform width dimension surrounding the piezoelectric resonator,
wherein the frame shape is a rectangular shape including sides and corners, and in the plan view of the principal surface of the base member, a width dimension of the sides is equal to a width dimension of the corners, and
wherein the base member includes respective anti-alloying films adjacent to each of the corners.

### Claim 10 (depends on 9)

The piezoelectric resonator unit according to claim 9, wherein the corners each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
in the plan view of the principal surface of the base member, a difference between the first radius and the second radius is equal to the width dimension of the sides.

### Claim 11 (depends on 9)

The piezoelectric resonator unit according to claim 9, wherein the joining member includes:
a sealing frame in the frame shape on the principal surface of the base member and disposed along an entire circumference of the lid member; and
a joining material in the frame shape on the sealing frame.

### Claim 12 (depends on 11)

The piezoelectric resonator unit according to claim 11, wherein the frame shape is a rectangular shape including sides and corners; and
in the plan view of the principal surface of the base member, a width dimension of the sides is equal to a width dimension of the corners.

### Claim 13 (depends on 12)

The piezoelectric resonator unit according to claim 12, wherein the corners each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
in the plan view of the principal surface of the base member, a difference between the first radius and the second radius is equal to the width dimension of the sides.

### Claim 14 (depends on 12)

The piezoelectric resonator unit according to claim 12, wherein the base member includes respective grooves adjacent to each of the corners.

### Claim 15 (depends on 9)

The piezoelectric resonator unit according to claim 9, wherein the lid member and the joining member are each made of a metal material.

### Claim 16

A piezoelectric resonator unit comprising:
a piezoelectric resonator;
a lid member and a base member defining an internal space that accommodates the piezoelectric resonator; and
a joining member joining the lid member and the base member,
wherein in a plan view of a principal surface of the base member, the joining member has a frame shape with a uniform width dimension surrounding the piezoelectric resonator,
wherein the joining member includes:
a sealing frame in the frame shape on the principal surface of the base member and disposed along an entire circumference of the lid member; and
a joining material in the frame shape on the sealing frame,
wherein the frame shape is a rectangular shape including sides and corners, and in the plan view of the principal surface of the base member, a width dimension of the sides is equal to a width dimension of the corners,
wherein the corners each include a linear portion having a same width dimension as the sides in the plan view of the principal surface of the base member, a first curve connecting a first side of the sides to the linear portion, and a second curve connecting a second side of the sides to the linear portion;
the first curve and the second curve each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
a difference between the first radius and the second radius is equal to the width dimension of the linear portion in the plan view of the principal surface of the base member.

### Claim 17

A piezoelectric resonator unit comprising:
a piezoelectric resonator;
a lid member and a base member defining an internal space that accommodates the piezoelectric resonator; and
a joining member joining the lid member and the base member,
wherein in a plan view of a principal surface of the base member, the joining member has a frame shape with a uniform width dimension surrounding the piezoelectric resonator,
wherein the joining member includes:
a sealing frame in the frame shape on the principal surface of the base member and disposed along an entire circumference of the lid member; and
a joining material in the frame shape on the sealing frame,
wherein the frame shape is a rectangular shape including sides and corners, and in the plan view of the principal surface of the base member, a width dimension of the sides is equal to a width dimension of the corners, and
wherein the base member includes respective anti-alloying films adjacent to each of the corners.

### Claim 18 (depends on 17)

The piezoelectric resonator unit according to claim 17, wherein the corners each include a first rounded portion having a first radius and a second rounded portion concentric with the first rounded portion and having a second radius different from the first radius; and
in the plan view of the principal surface of the base member, a difference between the first radius and the second radius is equal to the width dimension of the sides.

### Claim 19

A piezoelectric resonator unit manufacturing method, the method comprising:
preparing a base member;
holding a piezoelectric resonator on a principal surface of the base member; and
joining a lid member to the base member with a joining member,
wherein in a plan view of the principal surface of the base member, the joining member has a frame shape surrounding the piezoelectric resonator, and the frame shape has a uniform width
wherein the lid member and the joining member are each made of a metal material; and the joining of the lid member to the base member includes heating and melting the joining member,
wherein the frame shape is a rectangular shape including corners;
the corners each include a rounded portion; and
the joining of the lid member to the base member includes positioning respective anti-alloying films adjacent to each of the corners and forming the rounded portion of each corner using a corresponding one of the anti-alloying films.

### Claim 20 (depends on 19)

The piezoelectric resonator unit manufacturing method according to claim 19, further comprising:
adding a sealing frame on the principal surface of the base member;
adding a joining material on the lid member sealing frame; and
joining the sealing frame and the joining material to form the joining member.
