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US 11,309,837 B2Granted
Resonant filter using mm wave cavity
AssigneeInnovative Micro Technology
InventorsChristopher S. Gudeman, Abbas Abbaspour Tamijani
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Abstract
Systems and methods for forming a mm wave resonant filter include a lithographically fabricated high Q resonant structure. The resonant structure may include a plurality of cavities, each cavity having a characteristic frequency that defines its passband. A filter may include a plurality of resonant structures, and each resonant structure may include a plurality of cavities. These cavities and filters may be fabricated lithographically.
Claims13
A mm wave passband filter for a mm-wave emission source, fabricated photolithographically on a substrate, comprising:
- at least one resonant cavity formed in a plurality of substrates, wherein the cavity is formed by registration of voids formed using photolithographic methods in adjacent ones of the plurality of substrates to form a substrate stack, wherein the resonant cavity in the substrate stack has a characteristic dimension of about one half of a wavelength in the frequency spectrum of the mm-wave emission source, wherein the at least one cavity is dimensioned to define a resonant structure for at least some frequencies in the frequency spectrum of the mm wave source, and the characteristic dimension is between 1 mm and 7 mm.
Dependencies are inferred from the claim text.