# US 11,309,382 B2 · Electronic product comprising a component having triskelion-pillars, and corresponding fabrication method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,309,382 B2 - Document ID: US11309382B2 - Status: Granted - Kind: B2 - Application number: 17/072,410 - Filed: 2020-10-16 - Published: 2021-02-04 - Granted: 2022-04-19 - Earliest claimed: 2018-04-26 - Assignees: Murata Manufacturing Co., Ltd. - Applicants: Murata Manufacturing Co., Ltd. - Inventors: Stéphane Bouvier; Florent Lallemand - Web page: https://patentgrep.com/patent/US11309382B2 ## CPC - H10D 1/042: {using deposition processes to form electrode extensions} - H10D 1/66: Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors - H10D 1/714: {having horizontal extensions} - H10D 1/716: {having vertical extensions} - H10D 84/212: {of only capacitors} - H10P 50/693: {characterised by their size, orientation, disposition, behaviour or shape, in horizontal or vertical plane} - H10D 1/047: {of conductor-insulator-semiconductor capacitors, e.g. trench capacitors} - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An electronic product that includes a component having a first electrode with a first surface and a pillar extending from the first surface in a first direction, the pillar having three protrusions, the three protrusions forming angles of about 120 degrees with each other around a central line of the pillar where the three protrusions meet, and the three protrusions being bent so that the pillar has a triskelion cross-section in a plane perpendicular to the first direction. ## Claims ### Claim 1 An electronic product comprising: a component having a first electrode comprising a first surface and a pillar extending from the first surface in a first direction, the pillar comprising three protrusions, the three protrusions forming angles of about 120 degrees with each other around a central line of the pillar where the three protrusions meet, wherein the three protrusions are bent in the same direction so that the pillar has a triskelion cross-section in a plane perpendicular to the first direction, and wherein the protrusions each comprise three segments each having the same length and joined by angles of about 120 degrees. ### Claim 2 (depends on 1) The electronic product according to claim 1, wherein the pillar has an aspect ratio greater than 60 or 100, the aspect ratio being the length of a pillar divided by the smallest cross-sectional dimension measured perpendicularly to its length direction. ### Claim 3 (depends on 1) The electronic product according to claim 1, further comprising a plurality of pillars, each central line of a pillar being arranged at a vertex of a planar equilateral triangular tessellation formed in a plane perpendicular to the first direction. ### Claim 4 (depends on 3) The electronic product according to claim 3, wherein the plurality of pillars each have the same orientation. ### Claim 5 (depends on 1) The electronic product according to claim 1, wherein a cross section of the pillar is the same along an entire length of the pillar in the first direction. ### Claim 6 (depends on 1) The electronic product according to claim 1, wherein the pillar has a length which is greater than 60 micrometers. ### Claim 7 (depends on 1) The electronic product according to claim 1, wherein the first electrode is a first electrode of a capacitor of the electronic product. ### Claim 8 (depends on 1) A system comprising an electronic product according to claim 1. ### Claim 9 (depends on 1) A method for fabricating an electronic product according to claim 1. ### Claim 10 (depends on 1) The electronic product according to claim 1, wherein each of the three segments are linear. ### Claim 11 An electronic product comprising: a component having a first electrode comprising a first surface and a plurality of pillars extending from the first surface in a first direction, each of the plurality of pillars comprising three protrusions, and each central line the plurality of pillars being arranged at a vertex of a planar equilateral triangular tessellation formed in a plane perpendicular to the first direction, wherein the plurality of pillars each have the same orientation, the three protrusions forming angles of about 120 degrees with each other around a central line where the three protrusions meet, the three protrusions are bent in the same direction so that the plurality of pillars each have a triskelion cross-section in a plane perpendicular to the first direction, and a smallest distance between two parallel segments of protrusions of adjacent pillars is approximately equal to the smallest distance between two parallel segments of protrusions of a same pillar. ### Claim 12 (depends on 11) The electronic product according to claim 11, wherein the protrusions are formed of segments each having a width equal to the smallest distance. ### Claim 13 (depends on 11) The electronic product according to claim 11, wherein the plurality of pillars each have an aspect ratio greater than 60 or 100, the aspect ratio being the length of a respective pillar divided by the smallest cross-sectional dimension measured perpendicularly to its length direction. ### Claim 14 (depends on 11) The electronic product according to claim 11, wherein the protrusions each comprise three segments each having the same length and joined by angles of about 120 degrees. ### Claim 15 (depends on 14) The electronic product according to claim 14, wherein each of the three segments are linear. ### Claim 16 (depends on 11) The electronic product according to claim 11, wherein a cross section of the plurality of pillars is the same along an entire length of the plurality of pillars in the first direction. ### Claim 17 (depends on 11) The electronic product according to claim 11, wherein the plurality of pillars each have a length which is greater than 60 micrometers. ### Claim 18 (depends on 11) The electronic product according to claim 11, wherein the first electrode is a first electrode of a capacitor of the electronic product. ### Claim 19 (depends on 11) A system comprising an electronic product according to claim 11. ### Claim 20 (depends on 11) A method for fabricating an electronic product according to claim 11.