# US 11,309,206 B2 · Electro static chuck

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- Number: US 11,309,206 B2
- Document ID: US11309206B2
- Status: Granted
- Kind: B2
- Application number: 16/746,572
- Filed: 2020-01-17
- Published: 2021-07-08
- Granted: 2022-04-19
- Earliest claimed: 2020-01-08
- Assignees: MiCo Ceramics Ltd.
- Applicants: MiCo Ceramics Ltd.
- Inventors: Jeonghun Hwang; Hankyun Yoo; Sangbum Cho
- Web page: https://patentgrep.com/patent/US11309206B2

## CPC

- H10P 72/722: {Details of electrostatic chucks}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Disclosed is an electro static chuck. Disclosed is an electro static chuck which includes: a base substrate; and an electro static chuck plate fixed onto the base substrate and including a plurality of electrodes to which biases for chucking and dechucking are applied, in which the plurality of electrodes includes a spiral pattern extending from a start point of an edge of the electro static chuck plate toward an end point of a center and a rotational angle of the spiral pattern is 360°n (n is a real number of 1 to 2).

## Claims

### Claim 1

An electro static chuck comprising:
a base substrate; and
an electro static chuck plate fixed onto the base substrate and including a plurality of electrodes to which biases for chucking and dechucking are applied,
wherein each of the plurality of electrodes includes a spiral pattern extending from a start point of an edge of the electro static chuck plate toward an end point of a center and a rotational angle of the spiral pattern is 360° *n, n being a real number of 1 to 2, and
wherein the plurality of electrodes include a plurality of electrode patterns and a plurality of electrode gaps among the plurality of electrode patterns, and a length of a center line of the electrode gap is 1.1 to 5 times a length of a center line of the electrode pattern.

### Claim 2 (depends on 1)

The electro static chuck of claim 1, wherein the plurality of electrodes are rotationally symmetric.

### Claim 3 (depends on 1)

The electro static chuck of claim 1, wherein the plurality of electrodes include a plurality of first electrodes having a first polarity and a plurality of second electrodes having a second polarity, and
the plurality of first electrodes and the plurality of second electrodes are radially alternated.

### Claim 4 (depends on 3)

The electro static chuck of claim 3, wherein a total number of the plurality of first electrodes and the plurality of second electrodes is even.

### Claim 5 (depends on 3)

The electro static chuck of claim 3, wherein an area of each of the plurality of first electrodes and an area of each of the plurality of second electrodes are the same.

### Claim 6 (depends on 1)

The electro static chuck of claim 1, wherein each of the plurality of electrodes has one or more bent parts between the start point and the end point of the electro static chuck plate.

### Claim 7 (depends on 1)

The electro static chuck of claim 1, wherein each of the plurality of electrodes has a fluctuated contour between the start point and the end point of the electro static chuck plate.

### Claim 8 (depends on 1)

The electro static chuck of claim 1, wherein the plurality of electrodes have one or more holes for a cooling gas hole between the start point and the end point of the electro static chuck plate.

### Claim 9 (depends on 1)

The electro static chuck of claim 1, wherein the plurality of electrodes have a width narrowed part for a cooling gas hole between the start point and the end point of the electro static chuck plate.

### Claim 10 (depends on 1)

The electro static chuck of claim 1,
wherein each of the plurality of electrodes has two or more cross points passing through a first extension line except the end point, the first extension line being formed by extending a tangent when the tangent of a center line of the spiral pattern at the end point meets an outer periphery of the electro static chuck plate, and
wherein the cross points are points where the center line of the spiral pattern of each of the plurality of the electrodes intersects the first extension line.

### Claim 11 (depends on 10)

The electro static chuck of claim 10, wherein each of the plurality of electrodes has three or more cross points passing through a second extension line of a line segment orthogonal to the first extension line.

### Claim 12

An electro static chuck comprising:
an insulating layer;
an electrode layer on the insulating layer; and
a dielectric layer on the electrode layer,
wherein the electrode layer includes a plurality of electrodes for receiving biases for chucking and dechucking, and
each of the plurality of electrodes includes a spiral pattern extending from a start point of an edge of the electro static chuck plate toward an end point of a center and a rotational angle is 360° *n, n being a real number of 1 to 2, and
wherein the plurality of electrodes include a plurality of electrode patterns and a plurality of electrode gaps among the plurality of electrode patterns, and a length of a center line of the electrode gap is 1.1 to 5 times a length of a center line of the electrode pattern.