# US 11,309,205 B2 · Electrostatic chuck and electrostatic adsorption apparatus having the same

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- Number: US 11,309,205 B2
- Document ID: US11309205B2
- Status: Granted
- Kind: B2
- Application number: 16/591,369
- Filed: 2019-10-02
- Published: 2020-04-23
- Granted: 2022-04-19
- Earliest claimed: 2018-10-23
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Min Ho Bae; Hyok Keo Se Kwon; Tae Ho Youn
- Web page: https://patentgrep.com/patent/US11309205B2

## CPC

- H10P 72/722: {Details of electrostatic chucks}
- H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection}
- H10P 72/7616: {characterised by a coating, a hardness or a material}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.

## Claims

### Claim 1

An electrostatic chuck comprising:
a base;
a cushion layer on the base;
an electrode layer on the cushion layer; and
a dielectric layer on the electrode layer,
wherein the base, the cushion layer, the electrode layer, and the dielectric layer have through holes, the through holes each have a rectangular shape, and each of the through holes has a central axis, and
wherein each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.

### Claim 2 (depends on 1)

The electrostatic chuck of claim 1, wherein each central axis is parallel to two long sides of the respective through hole.

### Claim 3 (depends on 2)

The electrostatic chuck of claim 2, wherein short sides of each of the through holes are parallel to one of the two adjacent sides at the respective corner region.

### Claim 4 (depends on 1)

The electrostatic chuck of claim 1, wherein each of the through holes has a width in a range of 3 mm to 4 mm.

### Claim 5 (depends on 1)

The electrostatic chuck of claim 1, wherein the electrostatic chuck is configured to adsorb an object on the dielectric layer such that two adjacent sides at each corner of the object respectively overlap two of the through holes.

### Claim 6 (depends on 1)

The electrostatic chuck of claim 1, wherein the cushion layer has a thickness in a range of 0.2 mm to 0.3 mm.

### Claim 7 (depends on 6)

The electrostatic chuck of claim 6, wherein the cushion layer comprises polyethylene.

### Claim 8 (depends on 1)

The electrostatic chuck of claim 1, wherein the electrode layer comprises:
a first electrode configured to receive a first voltage; and
a second electrode configured to receive a second voltage different from the first voltage.

### Claim 9 (depends on 1)

The electrostatic chuck of claim 1, wherein the electrode layer comprises one selected from copper, aluminum, gold, silver, platinum, titanium, tungsten, molybdenum, carbon nanotube, conductive polymer, and transparent conductive oxide.

### Claim 10 (depends on 1)

The electrostatic chuck of claim 1, wherein the dielectric layer comprises polyimide.

### Claim 11 (depends on 1)

The electrostatic chuck of claim 1, further comprising:
a transparent lens layer in each of the through holes.

### Claim 12 (depends on 1)

The electrostatic chuck of claim 1, further comprising:
an insulating layer between the cushion layer and the electrode layer.

### Claim 13 (depends on 12)

The electrostatic chuck of claim 12, further comprising:
a first adhesive layer between the cushion layer and the insulating layer; and
a second adhesive layer between the electrode layer and the dielectric layer.

### Claim 14

An electrostatic adsorption apparatus, the apparatus comprising:
an electrostatic chuck having through holes;
a light emitting unit on one side of the electrostatic chuck corresponding to the through holes; and
a light receiving unit on an other side of the electrostatic chuck corresponding to the through holes,
wherein the electrostatic chuck comprises:
a base;
a cushion layer on the base;
an electrode layer on the cushion layer; and
a dielectric layer on the electrode layer,
wherein the base, the cushion layer, the electrode layer, and the dielectric layer have the through holes, the through holes each have a rectangular shape, and each of the through holes has a central axis, and
wherein each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.

### Claim 15 (depends on 14)

The apparatus of claim 14, wherein the light emitting unit is configured to emit infrared light.

### Claim 16 (depends on 14)

The apparatus of claim 14, wherein the light receiving unit comprises an image pickup device.

### Claim 17 (depends on 14)

The apparatus of claim 14, wherein each central axis is parallel to two long sides of the respective through hole.

### Claim 18 (depends on 14)

The apparatus of claim 14, wherein each of the through holes has a width in a range of 3 mm to 4 mm.

### Claim 19 (depends on 14)

The apparatus of claim 14, wherein the cushion layer has a thickness in a range of 0.2 mm to 0.3 mm.

### Claim 20 (depends on 19)

The apparatus of claim 19, wherein the cushion layer comprises polyethylene.