# US 11,309,200 B2 · Substrate storage container

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- Number: US 11,309,200 B2
- Document ID: US11309200B2
- Status: Granted
- Kind: B2
- Application number: 16/488,528
- Filed: 2017-02-27
- Published: 2020-02-06
- Granted: 2022-04-19
- Earliest claimed: 2017-02-27
- Assignees: Miraial Co., Ltd.
- Applicants: Miraial Co., Ltd.
- Inventors: Satoko Kai
- Web page: https://patentgrep.com/patent/US11309200B2

## CPC

- H10P 72/14: {Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls}
- H10P 72/1912: {characterised by shock absorbing elements, e.g. retainers or cushions}
- H10P 72/1914: {characterised by locking systems}
- H10P 72/1918: {characterised by coupling elements, kinematic members, handles or elements to be externally gripped}
- H10P 72/1921: {characterised by substrate supports}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A back side substrate support portion 6 includes a lower side inclined face 622 on which an end of a back face of a substrate W slides, and a substrate support portion 632 that is located above the lower side inclined face 622 and can support an edge portion of the substrate W. When a container main body opening portion 21 is closed by a lid body 3, the edge portion of the substrate W slides on the lower side inclined face 622 and reaches the substrate support portion 632. At least a portion of the lower side inclined face 622 is configured from a second member that is different from a first member that configures the substrate support portion 632, and the second member has a lower maximum static friction coefficient and lower wear resistance than the first member.

## Claims

### Claim 1

A substrate storage container comprising:
a container main body that includes a tubular wall portion with an opening circumferential portion at which a container main body opening portion is formed at one end and the other end closed, the container main body having a substrate storage space that can store a plurality of substrates by an inner face of the tubular wall portion, and is in communication with the container main body opening portion;
a lid body that is removably attached to the container main body opening portion and can close the container main body opening portion;
a side substrate support portion that is disposed so as to form a pair in the substrate storage space, and, when the container main body opening portion is not closed by the lid body, can support an edge portion of each of the plurality of substrates in a state in which adjacent substrates among the plurality of substrates are spaced apart at a predetermined interval and arranged in parallel to each other;
a lid body side substrate support portion that is disposed at a portion of the lid body that is a part opposing the substrate storage space when the container main body opening portion is closed by the lid body, and can support the edge portion of each of the plurality of substrates; and
a back side substrate support portion that is disposed so as to form a pair with the lid body side substrate support portion inside the substrate storage space, can support the edge portion of each of the plurality of substrates, and can support the plurality of substrates in cooperation with the lid body side substrate support portion when the container main body opening portion is closed by the lid body,
wherein the back side substrate support portion includes:
a lower side inclined face that extends in an inclined manner so as to be spaced apart from a center of the substrate storage space and on which an end of a back face of the substrate slides; and
a substrate support portion that is located above the lower side inclined face, and abuts and can support the edge portion of the substrate,
wherein, when the container main body opening portion is closed by the lid body, the edge portion of the substrate slides on the lower side inclined face and reaches the substrate support portion,
wherein a part of the lower side inclined face on which the edge portion of the substrate slides, the part being a portion of the lower side inclined face is configured by a second member that is different from a first member that configures the substrate support portion, and the second member has a lower maximum static friction coefficient and lower wear resistance than the first member, and
wherein the edge portion of the substrate slides on the second member and the end edge of the front face of the substrate and the end edge of the back face abut and are supported by the first member, the first member being made from a material different from that of the second member.

### Claim 2 (depends on 1)

The substrate storage container according to claim 1, wherein the second member is integrally molded with the first member by insert molding or two color molding.

### Claim 3 (depends on 1)

The substrate storage container according to claim 1, wherein the second member is configured from a component that is different from the first member, and is fixed to the first member.

### Claim 4 (depends on 1)

The substrate storage container according to claim 1, wherein the first member is configured from polycarbonate resin, and
wherein the second member is configured from polybutylene terephthalate resin.