# US 11,309,197 B2 · Micro-transfer printing with selective component removal > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,309,197 B2 - Document ID: US11309197B2 - Status: Granted - Kind: B2 - Application number: 16/672,399 - Filed: 2019-11-01 - Published: 2020-04-23 - Granted: 2022-04-19 - Earliest claimed: 2018-10-17 - Assignees: X Display Company Technology Limited - Applicants: X Display Company Technology Limited - Inventors: Erich Radauscher; Ronald S. Cok; Christopher Andrew Bower; Matthew Alexander Meitl - Web page: https://patentgrep.com/patent/US11309197B2 ## CPC - H10P 72/0446: {Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates} - H10P 72/74: {using temporarily an auxiliary support} - H10P 74/23: {characterised by multiple measurements, corrections, marking or sorting processes} - H10W 90/00: Package configurations - H10P 72/7414: {the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support} - H10P 72/7428: {used to support diced chips prior to mounting} - H10P 72/744: {Details of chemical or physical process used for separating the auxiliary support from a device or a wafer} - H10P 74/232: {comprising connection or disconnection of parts of a device in response to a measurement} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract An example of a method of micro-transfer printing comprises providing a micro-transfer printable component source wafer, providing a stamp comprising a body and spaced-apart posts, and providing a light source for controllably irradiating each of the posts with light through the body. Each of the posts is contacted to a component to adhere the component thereto. The stamp with the adhered components is removed from the component source wafer. The selected posts are irradiated through the body with the light to detach selected components adhered to selected posts from the selected posts, leaving non-selected components adhered to non-selected posts. In some embodiments, using the stamp, the selected components are adhered to a provided destination substrate. In some embodiments, the selected components are discarded. An example micro-transfer printing system comprises a stamp comprising a body and spaced-apart posts and a light source for selectively irradiating each of the posts with light. ## Claims ### Claim 1 A micro-transfer printing system, comprising: a transfer stamp comprising a body and spaced-apart posts connected to and protruding away from the body, wherein each of the spaced-apart posts has a contact surface at a distal end away from the body, and the body and the spaced-apart posts each comprises a visco-elastic material capable of contacting components to temporarily adhere the components to the contact surfaces of the spaced-apart posts; and a light source operable to controllably irradiate the spaced-apart posts through the body with light to detach the components from the contact surface of the spaced-apart posts, wherein the body and the posts are substantially transparent to the light. ### Claim 2 (depends on 1) The micro-transfer printing system of claim 1, comprising an optical system comprising optics, wherein the optical system is operable to controllably direct light from the light source to the posts through the optics. ### Claim 3 (depends on 2) The micro-transfer printing system of claim 2, wherein each of the posts comprises a distal end away from the body and the optical system is operable to irradiate the distal end of one of the posts at a time. ### Claim 4 (depends on 2) The micro-transfer printing system of claim 2, wherein each of the posts comprises a distal end away from the body and the optical system is operable to irradiate a distal end of each of multiple ones of the posts at a time. ### Claim 5 (depends on 2) The micro-transfer printing system of claim 2, comprising a memory operable to store a mapping of selected components and non-selected components, wherein the optical system is operable to controllably direct light from the light source to the posts based, at least in part, on the mapping. ### Claim 6 (depends on 1) The micro-transfer printing system of claim 1, comprising a motion-control system operable to move the transfer stamp in at least two directions. ### Claim 7 (depends on 6) The micro-transfer printing system of claim 6, comprising an optical system comprising optics, wherein the motion-control system comprises a motion platform at least partially disposed between the optics and the body, and at least a portion of the motion platform is transparent to the light emitted from the light source. ### Claim 8 (depends on 6) The micro-transfer printing system of claim 6, comprising an optical system comprising optics, wherein the motion-control system comprises a motion platform and the optics are disposed between the motion platform and the body. ### Claim 9 (depends on 8) The micro-transfer printing system of claim 8, wherein at least a portion of the motion platform is transparent to the light emitted from the light source. ### Claim 10 (depends on 1) The micro-transfer printing system of claim 1, wherein the light source is a laser. ### Claim 11 (depends on 1) The micro-transfer printing system of claim 1, comprising a component source wafer comprising micro-transfer printable components, wherein the motion-control system is operable to controllably contact the posts to the components to adhere one of the components to each of the posts and remove the transfer stamp from the component source wafer with a component adhered to the distal end of each of the posts. ### Claim 12 (depends on 1) The micro-transfer printing system of claim 1, comprising a component adhered to each of the posts. ### Claim 13 (depends on 12) The micro-transfer printing system of claim 12, wherein the component comprises an ablation layer of ablative material that is in contact with the post to which the component is adhered. ### Claim 14 (depends on 13) The micro-transfer printing system of claim 13, wherein the ablation layer is a layer of metal, a layer of dielectric material, a layer comprising a dye, a layer comprising a black material, or a layer comprising carbon black. ### Claim 15 (depends on 13) The micro-transfer printing system of claim 13, wherein the light emitted by the light source is non-visible light and the ablation layer is at least partially transparent to visible light. ### Claim 16 (depends on 13) The micro-transfer printing system of claim 13, wherein the ablation layer is a patterned layer. ### Claim 17 (depends on 13) The micro-transfer printing system of claim 13, wherein the ablation layer is an unpatterned layer. ### Claim 18 A micro-transfer printing system comprising: a motion-control system comprising a motion platform having a transfer stamp attached or mounted thereto, wherein the transfer stamp comprises a body and spaced-apart posts connected to and protruding away from the body, wherein each of the spaced-apart posts having a contact surface at a distal end away from the body, the body and the spaced-apart posts each comprising a visco-elastic material capable of contacting components to temporarily adhere the components to the spaced-apart posts, and the motion-control system is operable to move the transfer stamp in at least two directions; and a light source operable to controllably irradiate the spaced-apart posts through the body with light to detach the components from the distal end of the spaced-apart posts when the transfer stamp is attached or mounted to the motion platform. ### Claim 19 (depends on 18) The micro-transfer printing system of claim 18, wherein the light source is a laser. ### Claim 20 (depends on 18) The micro-transfer printing system of claim 18, comprising an optical system comprising optics, wherein the optical system is operable to controllably direct light from the light source to the posts through the optics. ### Claim 21 (depends on 20) The micro-transfer printing system of claim 20, wherein each of the posts comprises a distal end away from the body and the optical system is operable to irradiate the distal end of one of the posts at a time. ### Claim 22 (depends on 20) The micro-transfer printing system of claim 20, wherein each of the posts of the transfer stamp comprises a distal end away from the body and the optical system is operable to irradiate a distal end of each of multiple ones of the posts at a time. ### Claim 23 (depends on 20) The micro-transfer printing system of claim 20, comprising a memory operable to store a mapping of selected components and non-selected components, wherein the optical system is operable to controllably direct light from the light source to the posts based, at least in part, on the mapping. ### Claim 24 (depends on 18) The micro-transfer printing system of claim 18, comprising an optical system comprising optics, wherein the motion platform is at least partially disposed between the optics and the body, and at least a portion of the motion platform is transparent to the light emitted from the light source. ### Claim 25 (depends on 18) The micro-transfer printing system of claim 18, comprising an optical system comprising optics, wherein the optics are disposed between the motion platform and the body. ### Claim 26 (depends on 25) The micro-transfer printing system of claim 25, wherein at least a portion of the motion platform is transparent to the light emitted from the light source.