# US 11,309,177 B2 · Apparatus and method for manufacturing a wafer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,309,177 B2 - Document ID: US11309177B2 - Status: Granted - Kind: B2 - Application number: 16/182,050 - Filed: 2018-11-06 - Published: 2020-05-07 - Granted: 2022-04-19 - Earliest claimed: 2018-11-06 - Assignees: STMicroelectronics S.r.l. - Applicants: STMICROELECTRONICS S.r.l. - Inventors: Ruggero Anzalone; Nicolo′ Frazzetto - Web page: https://patentgrep.com/patent/US11309177B2 ## CPC - H10P 90/12: {Preparing bulk and homogeneous wafers} - C23C 16/01: on temporary substrates, e.g. substrates subsequently removed by etching - C23C 16/325: {Silicon carbide} - C23C 16/4581: {characterised by material of construction or surface finish of the means for supporting the substrate} - C23C 16/4585: {Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds} - C23C 16/46: characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) - H10D 62/8325: {Silicon carbide} - H10P 14/24: using chemical vapour deposition [CVD] - H10P 14/2905: {Silicon, silicon germanium or germanium} - H10P 14/3408: {Silicon carbide} - H10P 72/0434: {mainly by convection} - H10P 72/0602: {Temperature monitoring} - H10P 72/74: {using temporarily an auxiliary support} - H10P 72/7611: {characterised by edge profile or support profile} - H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support} - H10P 90/00: Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement - H10P 72/7424: {used as a support during the manufacture of self-supporting substrates} - H10P 72/744: {Details of chemical or physical process used for separating the auxiliary support from a device or a wafer} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract Various embodiments provide an apparatus and method for fabricating a wafer, such as a SiC wafer. The apparatus includes a support having a plurality of arms for supporting a substrate. The arms allows for physical contact between the support and the substrate to be minimized. As a result, when the substrate is melted, surface tension between the arms and molten material is reduced, and the molten material will be less likely to cling to the support. ## Claims ### Claim 1 An apparatus, comprising: a chamber; a receptacle in the chamber; a heater configured to heat the chamber; an input duct configured to introduce a gas into the chamber; an output duct configured to remove the gas from the chamber; and a support in the chamber and on the receptacle, the support including a frame, an opening in the frame, and a plurality of arms, each of the plurality of arms having a fixed end and a free end opposite to the fixed end, the fixed end being attached to the frame, the free end extending in to the opening and being suspended over the receptacle, each of the plurality of arms including a body portion and a raised portion, the body portion having a first end attached to the frame and a second end attached to the raised portion. ### Claim 2 (depends on 1) The apparatus of claim 1 wherein each of the plurality of arms extend from the frame and towards a center of the opening. ### Claim 3 (depends on 1) The apparatus of claim 1 wherein the raised portion includes an upper surface and a plurality of angled side surfaces. ### Claim 4 (depends on 1) The apparatus of claim 1 wherein the frame and the opening have circular shapes. ### Claim 5 (depends on 1) The apparatus of claim 1 wherein the receptacle includes sidewalls, and the support is positioned on the sidewalls. ### Claim 6 A support, comprising: a frame; an opening in the frame; and a plurality of arms extending in to the opening, each of the plurality of arms being cantilevered from the frame, each of the plurality of arms including a body portion coupled to the frame, and a raised portion coupled to the body portion, an upper surface of the body portion being coplanar with an upper surface of the frame, the raised portion being positioned at a portion of the arm that is furthest away from the frame. ### Claim 7 (depends on 6) The support of claim 6 wherein the plurality of arms includes a first set of arms having a first length, and a second set of arms having a second length that is larger than the first length. ### Claim 8 (depends on 6) The support of claim 6 wherein the raised portion includes an upper surface and a plurality of angled side surfaces. ### Claim 9 (depends on 8) The support of claim 8 wherein the body portion includes an upper surface and a plurality of angled side surfaces. ### Claim 10 (depends on 9) The support of claim 9 wherein the upper surface of the raised portion is positioned above the upper surface of the body portion. ### Claim 11 (depends on 9) The support of claim 9 wherein the upper surface of the body portion is substantially coplanar with a surface of the frame. ### Claim 12 A support, comprising: a frame; an opening in the frame; and a plurality of arms physically coupled to the frame, the plurality of arms extending from the frame and in to the opening, the plurality of arms including a first set of arms having a first length, and a second set of arms having a second length smaller than the first length, each of the plurality of arms including a body portion physically coupled to the frame, and a raised portion physically coupled to the body portion, the frame and the raised portion being on opposite sides of the body portion. ### Claim 13 (depends on 12) The support of claim 12 wherein the raised portion includes an upper surface and a plurality of angled side surfaces. ### Claim 14 (depends on 13) The support of claim 13 wherein the body portion includes an upper surface and a plurality of angled side surfaces. ### Claim 15 (depends on 14) The support of claim 14 wherein the upper surface of the raised portion is positioned above the upper surface of the body portion. ### Claim 16 (depends on 12) The support of claim 12 wherein the plurality of arms extend towards a center of the opening. ### Claim 17 (depends on 12) The support of claim 12 wherein each of the first set of arms is positioned between two arms of the second set of arms.