# US 11,309,113 B2 · Multilayer substrate, actuator, and method of manufacturing multilayer substrate

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- Number: US 11,309,113 B2
- Document ID: US11309113B2
- Status: Granted
- Kind: B2
- Application number: 16/511,012
- Filed: 2019-07-15
- Published: 2019-11-07
- Granted: 2022-04-19
- Earliest claimed: 2017-03-24
- Assignees: Murata Manufacturing Co., Ltd.
- Applicants: Murata Manufacturing Co., Ltd.
- Inventors: Shingo Ito
- Web page: https://patentgrep.com/patent/US11309113B2

## CPC

- H01F 7/081: {Magnetic constructions}
- H01F 7/1646: {Armatures or stationary parts of magnetic circuit having permanent magnet}
- H01F 7/126: Supporting or mounting
- H01F 7/16: Rectilinearly-movable armatures (H01F7/17 takes precedence)
- H01F 27/2804: {Printed windings}
- H01F 27/2809: {on stacked layers}
- H01F 2007/068: {using printed circuit coils}
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A multilayer substrate includes a stacked body including a principal surface and insulating base material layers made of a thermoplastic resin that are stacked, and a coil including coil conductors. The coil includes a winding axis in a stacking direction. The coil conductors includes a first coil conductor closest to the principal surface, and a second coil conductor adjacent to or in a vicinity of the first coil conductor. The second coil conductor includes a wide portion of which a line width is larger than a line width of the first coil conductor. The wide portion includes an overlapping portion that overlaps with the first coil conductor, and a non-overlapping portion that does not overlap with the first coil conductor, when viewed from the stacking direction. The non-overlapping portion is curved to be closer to the principal surface than to the overlapping portion.

## Claims

### Claim 1

A multilayer substrate comprising:
a stacked body including a principal surface and provided by stacking a plurality of insulating base material layers made of a thermoplastic resin; and
a coil including:
a plurality of coil conductors provided on the plurality of insulating base material layers; and
a winding axis extending in a stacking direction in which the plurality of insulating base material layers are stacked; wherein
the plurality of coil conductors include:
a first coil conductor that is closest to the principal surface; and
a second coil conductor adjacent to or in a vicinity of the first coil conductor and including a wide portion of which a line width is larger than a line width of the first coil conductor;
the wide portion includes:
an overlapping portion that overlaps with the first coil conductor when viewed from the stacking direction; and
a non-overlapping portion that does not overlap with the first coil conductor when viewed from the stacking direction, and is adjacent to the overlapping portion in a width direction that is perpendicular or substantially perpendicular to an extension direction of the second coil conductor;
the non-overlapping portion is curved to be closer to the principal surface than to the overlapping portion; and
when viewed from the stacking direction, the non-overlapping portion is located on at least one of an outer peripheral side and an inner peripheral side of the second coil conductor in the width direction, at the wide portion.

### Claim 2 (depends on 1)

The multilayer substrate according to claim 1, wherein the non-overlapping portion includes a portion that is curved to a same or substantially a same position as a position of the first coil conductor in the stacking direction.

### Claim 3 (depends on 1)

The multilayer substrate according to claim 1, wherein the non-overlapping portion, when viewed from the stacking direction, is located on the outer peripheral side in a radial direction of the second coil conductor, at the wide portion.

### Claim 4 (depends on 1)

The multilayer substrate according to claim 1, wherein the non-overlapping portion, when viewed from the stacking direction, is located on the inner peripheral side in a radial direction of the second coil conductor, at the wide portion.

### Claim 5 (depends on 1)

The multilayer substrate according to claim 1, wherein the first coil conductor, when viewed from the stacking direction, includes an area of which more than half overlaps with the wide portion.

### Claim 6 (depends on 1)

The multilayer substrate according to claim 1, wherein each of the plurality of insulating base material layers is flexible and is a flat plate with a rectangular or substantially rectangular shape.

### Claim 7 (depends on 1)

The multilayer substrate according to claim 1, wherein each of the plurality of coil conductors is a rectangular or substantially rectangular loop-shaped conductor.

### Claim 8 (depends on 1)

The multilayer substrate according to claim 1, wherein a first end of the first coil conductor is electrically connected to a first end of the second coil conductor via a first interlayer connection conductor.

### Claim 9 (depends on 1)

The multilayer substrate according to claim 1, wherein a second end of the second coil conductor is electrically connected to a first end of the third coil conductor via a second interlayer connection conductor.

### Claim 10 (depends on 1)

The multilayer substrate according to claim 1, wherein the coil includes three turns that are defined by the plurality of coil conductors.

### Claim 11 (depends on 1)

The multilayer substrate according to claim 1, wherein a first end of the coil is electrically connected to a first external electrode, and a second end of the coil is electrically connected to a second external electrode.

### Claim 12 (depends on 1)

The multilayer substrate according to claim 1, wherein a second end of the second coil conductor is electrically connected to a first external electrode, and a second end of the third coil conductor is electrically connected to a second external electrode.

### Claim 13 (depends on 1)

An actuator comprising:
the multilayer substrate according to claim 1; and
a magnet; wherein
the magnet is closest to the first coil conductor among the plurality of coil conductors.

### Claim 14 (depends on 13)

The actuator according to claim 13, further comprising:
a movable object; wherein
the magnet is attached to the movable object.

### Claim 15 (depends on 14)

The actuator according to claim 14, wherein, in response to a predetermined current flowing in the coil, a magnetic field emitted from the coil displaces the magnet and the movable object in a direction perpendicular or substantially perpendicular to the stacking direction.

### Claim 16

A method of manufacturing a multilayer substrate, comprising, in sequence:
a coil conductor forming step of forming a plurality of coil conductors on a plurality of insulating base material layers made of a thermoplastic resin, the plurality of coil conductors including a first coil conductor and a second coil conductor including a wide portion of which a line width is larger than a line width of the first coil conductor;
a stacking step of stacking the plurality of insulating base material layers and placing the second coil conductor adjacent to or in a vicinity of the first coil conductor; and
a stacked body forming step of forming a stacked body including a principal surface by heating and pressing the plurality of insulating base material layers that have been stacked; wherein
the first coil conductor among the plurality of coil conductors is closest to the principal surface and a non-overlapping portion of the wide portion is curved to be closer to the principal surface than to an overlapping portion of the wide portion;
the non-overlapping portion does not overlap with the first coil conductor when viewed from a stacking direction of the plurality of insulating base material layers; and
the overlapping portion overlaps with the first coil conductor when viewed from the stacking direction.

### Claim 17 (depends on 1)

The multilayer substrate according to claim 1, wherein the non-overlapping portion is included in a plurality of non-overlapping portions.
