# US 11,308,453 B2 · Method and system for scheduling pieces of materials based on real-time device status

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- Number: US 11,308,453 B2
- Document ID: US11308453B2
- Status: Granted
- Kind: B2
- Application number: 16/009,573
- Filed: 2018-06-15
- Published: 2018-10-18
- Granted: 2022-04-19
- Earliest claimed: 2015-12-17
- Assignees: Beijing Naura Microelectronics Equipment Co., Ltd.
- Applicants: Beijing Naura Microelectronics Equipment Co., Ltd
- Inventors: Lin Cui
- Web page: https://patentgrep.com/patent/US11308453B2

## CPC

- G06Q 10/1093: Calendar-based scheduling for persons or groups
- B62D 61/06: with only three wheels
- G05B 19/418: Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- H10P 72/30: for conveying, e.g. between different workstations
- G05B 2219/45031: Manufacturing semiconductor wafers
- H10P 72/0468: {comprising a chamber adapted to a particular process}
- H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance}
- Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
- G06Q: INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- B62D: MOTOR VEHICLES; TRAILERS (steering, or guiding on a desired track, of agricultural machines or implements A01B69/00; wheels, castors, axles, increasing wheel adhesion B60B; vehicle tyres, tyre inflation or tyre changing B60C; connections between vehicles of a train or the like B60D; vehicles for use on rail and road, amphibious or convertible vehicles B60F; suspension arrangements B60G; heating, cooling, ventilating or other air treating devices B60H; windows, windscreens, non-fixed roofs, doors or similar devices, protective coverings for vehicles not in use B60J; propulsion plant arrangements, auxiliary drives, transmissions, controls, instrumentation or dashboards B60K; electric equipment or propulsion of electrically-propelled vehicles B60L; power supply for electrically-propelled vehicles B60M; passenger accommodation not otherwise provided for B60N; adaptations for load transportation or to carry special loads or objects B60P; arrangement of signalling or lighting devices, the mounting or supporting thereof or circuits therefor, for vehicles in general B60Q; vehicles, vehicle fittings or vehicle parts not otherwise provided for B60R; servicing, cleaning, repairing, supporting, lifting, or manoeuvring, not otherwise provided for, B60S; brake arrangements, brake control systems or parts thereof B60T; air-cushion vehicles B60V; motor-cycles, accessories therefor B62J, B62K; testing of vehicles G01M)
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

The present disclosure provides a method and system for scheduling pieces of materials based on a real-time status of a device. Scheduling rules for scheduling the pieces of materials are obtained according to determined parameters. It is determined whether all designated transmission and process tasks of the pieces of materials are completed. If the designated transmission and processing tasks of the pieces of materials are completed, terminating the scheduling of the pieces of materials. If the designated transmission and processing tasks of the pieces of materials are not completed, each of the scheduling rules for scheduling the pieces of materials according to real-time status information of the device are traversed, and according to a traversing result, operation instructions corresponding to the scheduling rules for scheduling the pieces of materials are executed. The real-time status information of the device is updated according to a device status after executions of the operation instructions are completed.

## Claims

### Claim 1

A method for scheduling pieces of materials based on a real-time status of a device, comprising:
obtaining, according to determined parameters, scheduling rules for scheduling the pieces of materials;
determining whether designated transmission and processing tasks of the pieces of materials are completed;
if the designated transmission and processing tasks of the pieces of materials are completed, terminating the scheduling of the pieces of materials; and
if the designated transmission and processing tasks of the pieces of materials are not completed,
traversing each of the scheduling rules for scheduling the pieces of materials according to real-time status information of the device, and executing operation instructions corresponding to the scheduling rules for scheduling the pieces of materials according to a traversing result; and
updating the real-time status information of the device according to a device status after executions of the operation instructions are completed, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed.

### Claim 2 (depends on 1)

The method according to claim 1, wherein the determined parameters comprise: a pre-cleaning time, a degassing time, a processing time of the pieces of materials being processed at each processing position, a picking-and-placing time of a robot, and a transmission time of the pieces of materials moving from a current processing position to a next processing position.

### Claim 3 (depends on 1)

The method according to claim 1, wherein traversing each of the scheduling rules for scheduling the pieces of materials according to the real-time status information of the device, and executing the operation instructions corresponding to the scheduling rules for scheduling the pieces of materials according to the traversing result, comprises:
traversing, according to status parameters of the real-time status information of the device, each of the scheduling rules for scheduling the pieces of materials until the operation instructions corresponding to the status parameters are obtained; and
determining whether all of the scheduling rules for scheduling the pieces of materials are traversed;
if all of the scheduling rules for scheduling the pieces of materials are traversed, executing the operation instructions corresponding to the status parameters; and if not all of the scheduling rules for scheduling the pieces of materials are traversed, traversing, according to the status parameters, remaining scheduling rules for scheduling the pieces of materials.

### Claim 4 (depends on 1)

The method according to claim 1, wherein updating the real-time status information of the device according to the device status that the executions of the operation instructions are completed, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed, comprises:
determining whether the executions of all the operation instructions are completed at a same time;
if the executions of all the operation instructions are completed at the same time, updating the real-time status information of the device according to a device status after the executions of all operation instructions are completed, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed; and
if the executions of the operation instructions are not completed at the same time, updating the real-time status information of the device according to a device status corresponding to an execution of an operation instruction being completed previously, and a device status corresponding to an operation instruction being executed currently, and redetermining whether the designated transmission and process tasks of the pieces of materials are completed.

### Claim 5 (depends on 1)

The method according to claim 1, wherein the device comprises a loading chamber, a pre-cleaning chamber, a degassing chamber, and a processing chamber; a robot disposed at the loading chamber for transporting the pieces of materials among the pre-cleaning chamber, the degassing chamber and the processing chamber; a plurality of processing positions symmetrically distributed along a circumferential direction of the processing chamber for independently processing the pieces of materials; a turntable disposed at the processing chamber for transporting the pieces of materials to a position above a corresponding disc by rotating, and a disc disposed at the processing chamber for transporting the pieces of materials to a processing position or on the turntable by lifting, wherein:
the scheduling rules for scheduling the pieces of materials comprise:
S100: obtaining an initial status information of the device;
S101: updating a status of the robot;
S102: updating a status of the disc;
S103: determining whether a piece of material is contained in the loading chamber and the pre-cleaning chamber is empty; if the piece of material is contained in the loading chamber and the pre-cleaning chamber is empty, executing S103-1; and if no material is contained in the loading chamber or the pre-cleaning chamber is not empty, executing S104;
S104: determining whether a processing of the pre-cleaning chamber is completed; if the processing of the pre-cleaning chamber is completed, executing S105; and if the processing of the pre-cleaning chamber is not completed, executing S104-1;
S105, determining, whether the degassing chamber is empty; if the degassing chamber is not empty, executing S105-1; if the degassing chamber is empty and the robot is idle, executing S106; and if the degassing chamber is empty and the robot is not idle, executing S107;
S106: using the robot to transport the pieces of materials from the pre-cleaning chamber to the degassing chamber, and updating statuses of the pre-cleaning chamber, the degassing chamber and the robot;
S107: determining whether an ending output is generated; if the ending output is generated, scheduling the pieces of materials according to an ending processing rule; and if no ending output is generated, executing S108, wherein the ending output includes a scenario in which no material is contained in the loading chamber, processing of the pre-cleaning chamber and the degassing chamber is completed, and an unprocessed material is contained on the disc;
S108: determining whether processing of the pieces of materials is completed; if the processing of the pieces of materials is completed, terminating; and if the processing of the pieces of materials is not completed, executing S101;
S103-1: determining whether the robot is idle; if the robot is idle, executing S103-2; and if the robot is not idle, executing S104;
S103-2: using the robot to transport the pieces of materials from the loading chamber to the pre-cleaning chamber, updating the statuses of the robot and the pre-cleaning chamber, and executing S107;
S104-1: determining whether processing of the degassing chamber is completed; if the processing of the degassing chamber is completed and the robot is idle, executing S104-2; and if the processing of the degassing chamber is not completed, executing S105;
S104-2: determining whether the disc is available, and if the disc is available, executing S104-3;
S104-3: using the robot to transport the pieces of materials from the degassing chamber to the processing position, updating the statuses of the robot, the degassing chamber and the process position, and executing S107; and
S105-1: determining whether the processing of the degassing chamber is completed; if the processing of the degassing chamber is completed and the robot is idle, executing S104-2; and if the processing of the degassing chamber is not completed, executing S106.

### Claim 6 (depends on 5)

The method according to claim 5, wherein:
the device further comprises a buffering chamber; and
in S104-2, if the disc is not available, executing S104-4, wherein;
S104-4: determining, whether the buffering chamber is available; if the buffering chamber is available, executing S104-5; and if the buffering chamber is not available, executing S105; and
S104-5: using the robot to transport the pieces of materials from the degassing chamber to the buffer chamber and updating the statuses of the robot, the buffer chamber, and the degassing chamber, and executing S107.

### Claim 7 (depends on 5)

The method according to claim 5, wherein the ending processing rule comprises:
determining whether the disc is idle, and if the disc is idle, rotating the turntable to transport the unprocessed pieces of materials to a position above the disc and lifting the disc to transport the unprocessed pieces of materials to a corresponding processing position for processing.

### Claim 8 (depends on 7)

The method according to claim 7, comprising: simultaneously processing the unprocessed pieces of materials if the disc is idle and the unprocessed pieces of materials are at two or more processing positions.

### Claim 9 (depends on 1)

The method according to claim 1, wherein obtaining, according to the determined parameters, the scheduling rules for scheduling the pieces of materials, comprises: based on the determined parameters, obtaining the scheduling rules for scheduling the pieces of materials based on a dynamic programming theory.

### Claim 10 (depends on 1)

The method according to claim 1, wherein obtaining, according to the determined parameters, the scheduling rules for scheduling the pieces of materials includes: obtaining, according to the determined parameters, the scheduling rules based on an offline calculation.

### Claim 11 (depends on 3)

The method according to claim 3, further including:
storing each operation instruction corresponding to each of the status parameters after the operation instruction is obtained by traversing each of the optima rules for scheduling the pieces of materials;
obtaining all the operation instructions corresponding to all the status parameters; and
executing all the operation instructions at the same time.