# US 11,307,504 B2 · Humidity control in EUV lithography

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- Number: US 11,307,504 B2
- Document ID: US11307504B2
- Status: Granted
- Kind: B2
- Application number: 16/905,167
- Filed: 2020-06-18
- Published: 2020-10-08
- Granted: 2022-04-19
- Earliest claimed: 2017-09-19
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: An-Ren Zi; Chin-Hsiang Lin; Ching-Yu Chang; Joy Cheng
- Web page: https://patentgrep.com/patent/US11307504B2

## CPC

- G03F 7/70866: {of mask or workpiece}
- G03F 7/038: Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021)
- G03F 7/039: Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023)
- G03F 7/063: {Additives or means to improve the lithographic properties; Processing solutions characterised by such additives; Treatment after development or transfer, e.g. finishing, washing; Correction or deletion fluids}
- G03F 7/168: {Finishing the coated layer, e.g. drying, baking, soaking}
- G03F 7/2004: {characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light}
- G03F 7/3057: {characterised by the processing units other than the developing unit, e.g. washing units}
- G03F 7/32: Liquid compositions therefor, e.g. developers
- G03F 7/38: Treatment before imagewise removal, e.g. prebaking {(G03F7/265 takes precedence)}
- G03F 7/40: Treatment after imagewise removal, e.g. baking
- H10P 76/2041: {Photolithographic processes}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A layer is formed over a wafer. The layer contains a material that is sensitive to an extreme ultraviolet (EUV) radiation. A first baking process is performed to the layer. The first baking process is performed with a first humidity level that is greater than about 44%. After the first baking process, the layer is exposed to EUV radiation. A second baking process is performed to the layer. The second baking process is performed with a second humidity level that is greater than about 44%. The layer is rinsed with a liquid that contains water before the second baking process or after the second baking process. After the exposing, the layer is developed with a developer solution that contains water.

## Claims

### Claim 1

A method, comprising:
forming a layer over a wafer, the layer containing a material that is sensitive to an extreme ultraviolet (EUV) radiation;
performing a first baking process to the layer, wherein the first baking process is performed with a first humidity level that is greater than about 44%
exposing, after the first baking process, the layer to EUV radiation;
performing a second baking process to the layer, wherein the second baking process is performed with a second humidity level that is greater than about 44%;
rinsing the layer with a liquid that contains water before the second baking process or after the second baking process; and
developing, after the exposing, the layer with a developer solution that contains water.

### Claim 2 (depends on 1)

The method of claim 1, further comprising: mixing an EUV photoresist, a solvent, and water into a mixture, wherein the mixture is spin-coated over the wafer as the layer.

### Claim 3 (depends on 2)

The method of claim 2, wherein the mixing is performed such that a water content in the mixture is between about 1% and about 15%.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first baking process is performed such that the first humidity level is in a range between about 46% and about 55%.

### Claim 5 (depends on 1)

The method of claim 1, wherein the second baking process is performed such that the second humidity level is in a range between about 46% and about 55%.

### Claim 6 (depends on 1)

The method of claim 1, wherein the rinsing is performed between the exposing and the second baking process.

### Claim 7 (depends on 1)

The method of claim 1, wherein the rinsing is performed between the second baking process and the developing.

### Claim 8 (depends on 1)

The method of claim 1, wherein the rinsing comprises:
performing a first rinsing process between the exposing and the second baking process; and
performing a second rinsing process between the second baking process and the developing.

### Claim 9 (depends on 1)

The method of claim 1, wherein the rinsing is performed with a liquid, wherein a water content in the liquid is in a range between about 0.1% and about 10%.

### Claim 10 (depends on 1)

The method of claim 1, wherein the developing is performed such that a water content in the developer solution is in a range between about 0.1% and about 10%.

### Claim 11

A semiconductor fabrication system, comprising:
a photoresist coating tool configured to introduce water to a photoresist layer and to coat the photoresist layer over a wafer;
a baking tool configured to bake the photoresist layer at a humidity setting greater than about 44%;
an exposure tool configured to expose the photoresist layer to extreme ultraviolet (EUV) light;
a rinsing tool configured to rinse the photoresist layer with a liquid that contains water;
a developing tool configured to develop the photoresist layer with a developer solution that contains water; and
one or more controllers configured to control: an amount of water introduced to the photoresist layer by the photoresist coating tool, the humidity setting of the baking tool, an amount of water in the liquid for the rinsing tool, and an amount of water in the developer solution for the developer tool, wherein at least some of the one or more controllers are integrated into one or more of: the photoresist coating tool, the baking tool, the rinsing tool, or the developing tool.

### Claim 12 (depends on 11)

The semiconductor fabrication system of claim 11, wherein the one or more controllers are configured to control the baking tool to bake the photoresist layer at a humidity setting of greater than about 44%.

### Claim 13 (depends on 12)

The semiconductor fabrication system of claim 12, wherein the one or more controllers are configured to control the baking tool to bake the photoresist layer at a humidity setting of between about 46% and about 55%.

### Claim 14 (depends on 11)

The semiconductor fabrication system of claim 11, wherein:
the one or more controllers are configured to control the photoresist coating tool such that a water content of the photoresist layer is between about 1% and about 15%;
the one or more controllers are configured to control the rinsing tool such that a water content of the liquid is between about 0.1% and about 10%; and
the one or more controllers are configured to control the developing tool such that a water content of the developer solution is between about 0.1% and about 10%.

### Claim 15 (depends on 11)

The semiconductor fabrication system of claim 11, wherein the one or more controllers are further configured to control the rinsing tool to rinse the photoresist layer after the photoresist layer is exposed using the exposure tool but before the photoresist layer is baked using the baking tool.

### Claim 16 (depends on 11)

The semiconductor fabrication system of claim 11, wherein the one or more controllers are further configured to control the rinsing tool to rinse the photoresist layer after the photoresist layer is baked using the baking tool but before the photoresist layer is developed using the developing tool.

### Claim 17

A method, comprising:
forming a photoresist layer over a substrate;
performing a pre-exposure baking process to the photoresist layer in a controlled environment having a humidity level greater than about 44%;
performing an exposure process to the photoresist layer;
performing a post-exposure baking process to the photoresist layer in the controlled environment;
performing a rinsing process to the photoresist layer with a water-containing liquid before the pre-exposure baking process or after the post-exposure baking process; and
performing a photoresist developing process using a developer solution that contains water.

### Claim 18 (depends on 17)

The method of claim 17, wherein the forming the photoresist layer comprises:
mixing an extreme ultraviolet (EUV) photoresist material with a solvent and water into a mixture; and
spin coating the mixture over the substrate.

### Claim 19 (depends on 18)

The method of claim 18, wherein the mixing is performed such that a water content in the mixture is between about 1% and about 15%.

### Claim 20 (depends on 17)

The method of claim 17, wherein the controlled environment is controlled to have a humidity level between about 46% and about 55%.