# US 11,307,468 B2 · Array substrate and manufacturing method thereof

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- Number: US 11,307,468 B2
- Document ID: US11307468B2
- Status: Granted
- Kind: B2
- Application number: 16/754,332
- Filed: 2019-11-11
- Published: 2022-01-06
- Granted: 2022-04-19
- Earliest claimed: 2019-08-20
- Assignees: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicants: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Inventors: Yuan Yan; Yong Xu; Dewei Song; Fei Ai
- Web page: https://patentgrep.com/patent/US11307468B2

## CPC

- G02F 1/136236: {using a grey or half tone lithographic process}
- G02F 1/13338: {Input devices, e.g. touch panels}
- G02F 1/13439: {characterised by their electrical, optical, physical properties; materials therefor; method of making}
- G06F 3/0412: {Digitisers structurally integrated in a display}
- H10D 86/0231: {using masks, e.g. half-tone masks}
- G02F 1/134372: {for fringe field switching [FFS] where the common electrode is not patterned}
- G06F 2203/04103: Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

The present disclosure provides an array substrate and a manufacturing method of the array substrate. The method includes sequentially forming an active layer and an insulating layer on a substrate; forming a common electrode layer and a first metal layer on the insulating layer using a same photomask, wherein the common electrode layer includes touch electrodes; and forming a second metal layer on the pixel electrode layer, wherein the second metal layer includes touch signal lines, and the touch signal lines electrically are electrically connected to the touch electrodes.

## Claims

### Claim 1

A manufacturing method of an array substrate, comprising:
providing a substrate;
forming a patterned active layer on the substrate;
forming an insulating layer on the active layer;
forming a patterned common electrode layer and a patterned first metal layer on the insulating layer using a same photomask, wherein the patterned common electrode layer comprises touch electrodes;
forming a patterned protective layer and a patterned pixel electrode layer on the first metal layer using a same photomask, wherein the patterned pixel electrode layer comprises pixel electrodes; and
forming a patterned second metal layer on the pixel electrode layer, wherein the patterned second metal layer comprises drain electrodes and touch signal lines, the drain electrodes are electrically connected to the pixel electrodes, and the touch signal lines are electrically connected to the touch electrodes;
wherein the step of forming the patterned common electrode layer and the patterned first metal layer on the insulating layer using the same photomask comprises:
sequentially forming the common electrode layer, the first metal layer, and a first photoresist layer on the insulating layer;
exposing the first photoresist layer by a first half-tone photomask, and then exposing the first photoresist layer to form a patterned first photoresist layer, wherein the patterned first photoresist layer comprises a first portion corresponding to a gate portion to be formed in the first metal layer, a second portion corresponding to a portion of the touch electrodes to be formed in the common electrode layer, and a first through hole corresponding to a source/drain area of the active layer; and a thickness of the first portion is greater than a thickness of the second portion;
using the patterned first photoresist layer as a mask to etch the common electrode layer and the first metal layer by a wet etching process to form a gate electrode;
performing heavy doping on the active layer through the first through hole;
ashing the patterned first photoresist layer to thin the first portion and remove the second portion;
removing exposed parts of the first metal layer by etching;
removing remaining parts of the first photoresist layer; and
performing light doping on the active layer.

### Claim 2 (depends on 1)

The manufacturing method of the array substrate as claimed in claim 1, wherein the first half-tone photomask comprises a first light transmitting portion and a second light transmitting portion, a light transmittance of the first light transmitting portion is greater than a light transmittance of the second light transmitting portion, the light transmittance of the first light transmitting portion is 100%, the first light transmitting portion is disposed corresponding to the source/drain area of the active layer, and the second light transmitting portion is disposed corresponding to a portion of the touch electrodes to be formed in the common electrode layer.

### Claim 3 (depends on 1)

The manufacturing method of the array substrate as claimed in claim 1, wherein the step of forming the patterned protective layer and the patterned pixel electrode layer on the first metal layer using the same photomask comprises:
sequentially forming the protective layer, the pixel electrode layer, and a second photoresist layer on the first metal layer;
exposing the second photoresist layer by a second half-tone photomask, and then exposing the second photoresist layer to form a patterned second photoresist layer, wherein the patterned second photoresist layer comprises a second through hole corresponding to the source/drain area of the active layer, a third through hole corresponding to the touch electrodes, a third portion corresponding to a portion of the pixel electrodes to be formed in the pixel electrode layer, and a fourth portion corresponding to a portion to be removed in the pixel electrode layer; and a thickness of the third portion is greater than a thickness of the fourth portion;
using the patterned second photoresist layer as a mask to sequentially etch the pixel electrode layer and the protective layer to expose the source/drain area of the active layer through the second through hole and expose the touch electrodes through the third through hole;
ashing the patterned second photoresist layer to thin the third portion and remove the fourth portion;
etching the pixel electrode layer to remove its exposed parts so as to form the patterned pixel electrode layer; and
removing remaining parts of the second photoresist layer.

### Claim 4 (depends on 3)

The manufacturing method of the array substrate as claimed in claim 3, wherein the second half-tone photomask comprises a third light transmitting portion and a fourth light transmitting portion, a light transmittance of the third light transmitting portion is greater than a light transmittance of the fourth light transmitting portion, the light transmittance of the third light transmitting portion is 100%, the third light transmitting portion is disposed corresponding to the source/drain area of the active layer and the touch electrodes, and the fourth light transmitting portion is disposed corresponding to parts of the pixel electrode layer to be removed.

### Claim 5 (depends on 3)

The manufacturing method of the array substrate as claimed in claim 3, the step of using the patterned second photoresist layer as the mask to sequentially etch the pixel electrode layer and the protective layer comprises etching the pixel electrode layer by a wet etching process and etching the protective layer by a dry etching process.

### Claim 6

A manufacturing method of an array substrate, comprising:
providing a substrate;
forming a patterned active layer on the substrate;
forming an insulating layer on the active layer;
forming a patterned common electrode layer and a patterned first metal layer on the insulating layer using a same photomask, wherein the patterned common electrode layer comprises touch electrodes;
forming a patterned protective layer and a patterned pixel electrode layer on the first metal layer, wherein the patterned pixel electrode layer comprises pixel electrodes; and
forming a patterned second metal layer on the pixel electrode layer, wherein the patterned second metal layer comprises drain electrodes and touch signal lines, the drain electrodes are electrically connected to the pixel electrodes, and the touch signal lines are electrically connected to the touch electrodes.

### Claim 7 (depends on 6)

The manufacturing method of the array substrate as claimed in claim 6, wherein the step of forming the patterned common electrode layer and the patterned first metal layer on the insulating layer using the same photomask comprises:
sequentially forming the common electrode layer, the first metal layer, and a first photoresist layer on the insulating layer;
exposing the first photoresist layer by a first half-tone photomask, and then exposing the first photoresist layer to form a patterned first photoresist layer, wherein the patterned first photoresist layer comprises a first portion corresponding to a gate portion to be formed in the first metal layer, a second portion corresponding to a portion of the touch electrodes to be formed in the common electrode layer, and a first through hole corresponding to a source/drain area of the active layer; and a thickness of the first portion is greater than a thickness of the second portion;
using the patterned first photoresist layer as a mask to etch the common electrode layer and the first metal layer by a wet etching process to form a gate electrode;
performing heavy doping on the active layer through the first through hole;
ashing the patterned first photoresist layer to thin the first portion and remove the second portion;
removing exposed parts of the first metal layer by etching;
removing remaining parts of the first photoresist layer; and
performing light doping on the active layer.

### Claim 8 (depends on 7)

The manufacturing method of the array substrate as claimed in claim 7, wherein the first half-tone photomask comprises a first light transmitting portion and a second light transmitting portion, a light transmittance of the first light transmitting portion is greater than a light transmittance of the second light transmitting portion, the light transmittance of the first light transmitting portion is 100%, the first light transmitting portion is disposed corresponding to the source/drain area of the active layer, and the second light transmitting portion is disposed corresponding to a portion of the touch electrodes to be formed in the common electrode layer.

### Claim 9 (depends on 6)

The manufacturing method of the array substrate as claimed in claim 6, wherein the patterned protective layer and the patterned pixel electrode layer are formed on the first metal layer using a same photomask.

### Claim 10 (depends on 9)

The manufacturing method of the array substrate as claimed in claim 9, wherein the step of forming the patterned protective layer and the patterned pixel electrode layer on the first metal layer using a same photomask comprises:
sequentially forming the protective layer, the pixel electrode layer, and a second photoresist layer on the first metal layer;
exposing the second photoresist layer by a second half-tone photomask and then exposing the second photoresist layer to form a patterned second photoresist layer, wherein the patterned second photoresist layer comprises a second through hole corresponding to a source/drain area of the active layer, a third through hole corresponding to the touch electrodes, a third portion corresponding to a portion of the pixel electrodes to be formed in the pixel electrode layer, and a fourth portion corresponding to a portion to be removed in the pixel electrode layer; and a thickness of the third portion is greater than a thickness of the fourth portion;
using the patterned second photoresist layer as a mask to sequentially etch the pixel electrode layer and the protective layer to expose the source/drain area of the active layer through the second through hole and expose the touch electrodes through the third through hole;
ashing the patterned second photoresist layer to thin the third portion and remove the fourth portion;
etching the pixel electrode layer to remove its exposed parts so as to form the patterned pixel electrode layer; and
removing remaining parts of the second photoresist layer.

### Claim 11 (depends on 10)

The manufacturing method of the array substrate as claimed in claim 10, wherein the second half-tone photomask comprises a third light transmitting portion and a fourth light transmitting portion, a light transmittance of the third light transmitting portion is greater than a light transmittance of the fourth light transmitting portion, the light transmittance of the third light transmitting portion is 100%, the third light transmitting portion is disposed corresponding to the source/drain area of the active layer and the touch electrodes, and the fourth light transmitting portion is disposed corresponding to parts of the pixel electrode layer to be removed.

### Claim 12 (depends on 10)

The manufacturing method of the array substrate as claimed in claim 10, the step of using the patterned second photoresist layer as the mask to sequentially etch the pixel electrode layer and the protective layer comprises etching the pixel electrode layer by a wet etching process and etching the protective layer by a dry etching process.

### Claim 13

An array substrate, comprising:
a substrate;
an active layer;
an insulating layer;
a common electrode layer;
a first metal layer;
a protective layer;
a pixel electrode layer; and
a second metal layer;
wherein the active layer, the insulating layer, the common electrode layer, the first metal layer, the protective layer, the pixel electrode layer, and the second metal layer are sequentially disposed on the substrate;
the pixel electrode layer comprises pixel electrodes; the second metal layer comprises drain electrodes and touch signal lines; the common electrode layer comprises touch electrodes; the drain electrodes are electrically connected to the pixel electrodes; and the touch signal lines are electrically connected to the touch electrodes.

### Claim 14 (depends on 13)

The array substrate as claimed in claim 13, wherein the common electrode layer further comprises a first base portion disposed on a same layer as the touch electrodes, and the first metal layer is stacked on the first base portion.

### Claim 15 (depends on 13)

The array substrate as claimed in claim 13, wherein the pixel electrode layer further comprises a second base portion disposed on a same layer as the pixel electrodes, the second metal layer comprises source electrodes, and the source electrodes are stacked on the second base portion.