# US 11,307,451 B2 · Substrate for electro-optical device, electro-optical device, and electronic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,307,451 B2 - Document ID: US11307451B2 - Status: Granted - Kind: B2 - Application number: 17/179,032 - Filed: 2021-02-18 - Published: 2021-06-10 - Granted: 2022-04-19 - Earliest claimed: 2017-08-29 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Satoshi Ito - Web page: https://patentgrep.com/patent/US11307451B2 ## CPC - G02F 1/133526: {Lenses, e.g. microlenses or Fresnel lenses} - G02F 1/133345: {Insulating layers (G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence)} - G02F 1/134309: {characterised by their geometrical arrangement} - G02F 1/136209: {Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element} - G02F 1/136227: {Through-hole connection of the pixel electrode to the active element through an insulation layer} - G02F 1/1368: in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)} - G02F 1/133565: {inside the LC elements, i.e. between the cell substrates} - G02F 2201/50: Protective arrangements - G02F 2202/104: poly-Si - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract An element substrate of an electro-optical device (substrate for an electro-optical device) includes a first lens and a second lens. The first lens is formed between a first substrate and a switching element, and the second lens is formed between the switching element and a pixel electrode. The second lens includes a second lens concave surface and a second lens-forming lens layer. The second lens concave surface is recessed in a surface of an interlayer insulating film. The second lens-forming lens layer is filled in the inside of the second lens concave surface. The interlayer insulating film includes a contact hole in a location not overlapping, in a plan view, with the second lens concave surface. The contact hole electrically couples the pixel electrode to the switching element. ## Claims ### Claim 1 A substrate for an electro-optical device, the substrate comprising: a first substrate; a pixel electrode provided on the first substrate, the pixel electrode being made of a first material; a plurality of interlayer insulating films stacked between the first substrate and the pixel electrode; a switching element provided between the first substrate and the plurality of interlayer insulating films; a first lens provided between the first substrate and the switching element, the first lens overlapping, in plan view, with the pixel electrode; a second lens provided between the switching element and the pixel electrode, the second lens overlapping, in plan view, with the pixel electrode; and a plug provided between the switching element and the pixel electrode, the plug overlapping, in plan view, with the pixel electrode, the plug being made of a second material different from the first material, wherein the second lens includes a second lens surface and a second lens layer, the second lens surface is in contact with a first interlayer insulating film of the plurality of interlayer insulating films, and the second lens layer having a refractive index different from a refractive index of the first interlayer insulating film, the first interlayer insulating film includes a contact hole in a location not overlapping, in plan view, with the second lens surface, the contact hole being filled with the second material as the plug, the plug is in contact with the pixel electrode and a relay electrode formed under the first interlayer insulating film, the pixel electrode being electrically connected through the plug and the relay electrode to the switching element, and a surface of a pixel electrode side of the second lens layer and a surface of a pixel electrode side of the first interlayer insulating film in combination constitute a continuous flat surface. ### Claim 2 (depends on 1) The substrate for the electro-optical device according to claim 1, wherein the plug is made of a metal such as tungsten. ### Claim 3 (depends on 1) The substrate for the electro-optical device according to claim 1, wherein the pixel electrode has a substantially quadrilateral shape in plan view, and the plug overlaps, in plan view, with a corner portion of the pixel electrode. ### Claim 4 (depends on 1) The substrate for the electro-optical device according to claim 1, wherein the first lens has a first size that is larger than a second size of the second lens in plan view. ### Claim 5 (depends on 1) The substrate for the electro-optical device according to claim 1, wherein the first lens includes a first lens surface, and includes a first lens layer filled in an inside of the first lens surface. ### Claim 6 (depends on 1) The substrate for the electro-optical device according to claim 1, further comprising: a light shielding layer provided between the switching element and the first substrate, the light shielding layer including an aperture that overlaps, in plan view, with the first lens, wherein the light shielding layer overlaps, in plan view, with the switching element. ### Claim 7 (depends on 1) An electro-optical device comprising: the substrate according to claim 1. ### Claim 8 (depends on 7) An electronic apparatus comprising: the electro-optical device according to claim 7. ### Claim 9 A substrate for an electro-optical device, the substrate comprising: a first substrate; a pixel electrode provide on the first substrate, the pixel electrode being made of a first material; a plurality of interlayer insulating films stacked between the first substrate and the pixel electrode; a switching element provided between the first substrate and the plurality of interlayer insulating films; a lens provided between the switching element and the pixel electrode, the lens overlapping, in plan view, with the pixel electrode; a plug provided between the switching element and the pixel electrode, the plug overlapping, in plan view, with the pixel electrode, the plug being made of a second material different from the first material, wherein: the lens includes a lens surface and a lens layer, the lens surface is in contact with a first interlayer insulating film of the plurality of interlayer insulating films, and the lens layer having a refractive index different from a refractive index of the first interlayer insulating film, the first interlayer insulating film includes a contact hole in a location not overlapping, in plan view, with the lens surface, the contact hole being filled with the second material as the plug, the plug is in contact with the pixel electrode and a relay electrode formed under the first interlayer insulating film, the pixel electrode being electrically connected through the plug and the relay electrode to the switching element, and a surface of a pixel electrode side of the lens layer and a surface of a pixel electrode side of the first interlayer insulating film in combination constitute a continuous flat surface. ### Claim 10 (depends on 9) The substrate for the electro-optical device according to claim 9, wherein the plug is made of a metal such as tungsten. ### Claim 11 (depends on 9) An electro-optical device comprising: the substrate according to claim 9. ### Claim 12 (depends on 11) An electronic apparatus comprising the electro-optical device according to claim 11.