# US 11,307,407 B2 · Two-dimensional optical scanning mirror device, manufacturing method for same, two-dimensional optical scanner and image projector > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,307,407 B2 - Document ID: US11307407B2 - Status: Granted - Kind: B2 - Application number: 16/858,890 - Filed: 2020-04-27 - Published: 2020-08-13 - Granted: 2022-04-19 - Earliest claimed: 2016-10-31 - Assignees: National University Corporation University of Fukui - Applicants: National University Corporation University of Fukui - Inventors: Toshio Katsuyama; Ryoya Ishigami - Web page: https://patentgrep.com/patent/US11307407B2 ## CPC - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means} - G03B 21/2066: {Reflectors in illumination beam (in projection beam G03B21/28)} - H01F 10/08: characterised by magnetic layers ({H01F10/32 takes precedence } ; applying thin magnetic films to substrates H01F41/14) - H01F 41/32: for applying conductive, insulating or magnetic material on a magnetic film {, specially adapted for a thin magnetic film} - H01F 41/34: in patterns, e.g. by lithography - H04N 9/3129: {scanning a light beam on the display screen (scanning a light beam on a screen in displays other than projection devices G09G3/02; scanning systems in general G02B26/10; projectors using laser light sources in general H04N9/3161)} - G02B 27/0172: {characterised by optical features} - G03B 21/2013: {Plural light sources} - G03B 21/2033: {LED or laser light sources} - H01F 10/123: {having a L10 crystallographic structure, e.g. [Co,Fe][Pt,Pd] thin films} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D) - H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract A two-dimensional optical scanning mirror device, a manufacturing method for the same, a two-dimensional optical scanning device and an image projector. A two-dimensional optical scanning mirror device includes a substrate, a movable mirror portion supported on the substrate in such a manner that two-dimension optical scanning is possible, a hard magnetic thin film provided in the movable mirror portion and a magnetic field generator that includes at least an alternating magnetic field generator for driving the movable mirror portion, where the hard magnetic thin film has a magnetization direction in a direction of a film plane, and the ratio of the magnetic field generated by the magnetic field generator relative to the coercive force of the hard magnetic thin film is 0.2 or lower. ## Claims ### Claim 1 A two-dimensional optical scanning mirror device, comprising: a substrate; a movable mirror portion supported on a main surface of the substrate in such a manner that two-dimension optical scanning is possible, wherein the movable mirror portion includes, a reflection portion which reflects a light beam being incident along the main surface of the substrate, a rotational outer frame which supports the reflection portion with a pair of first hinges, and a non-rotational outer frame, mounted on the main surface of the substrate, which supports the rotational outer frame with a pair of second hinges, the pair of first hinges provides a high-speed optical scanning rotation axis for rotating the reflection portion so as to scan a reflection light beam reflected by the reflection portion in a first direction with a first frequency, the pair of second hinges, provided orthogonal to the pair of first hinges, provides a low-speed optical scanning rotation axis for rotating the rotational outer frame so as to scan the reflection light beam in a second direction orthogonal to the first direction with a second frequency lower than the first frequency, a rotation of the pair of first hinges has an inherent rotation frequency approximate to the first frequency, a reflective surface of the reflection portion of the movable mirror portion inclines by an angle within a range of 45°+/−30° relative to the main surface of the substrate in a state where an optical scanning signal for two-dimensionally scanning the movable mirror portion is not applied. ### Claim 2 (depends on 1) The two-dimensional optical scanning mirror device according to claim 1, further comprising: a hard magnetic thin film provided on the reflection portion of the movable mirror portion; and a magnetic field generator that includes at least an alternating magnetic field generator for driving the reflection portion and the rotational outer frame of the movable mirror portion, wherein the hard magnetic thin film has a magnetization direction in a direction of a film plane, and the ratio of the magnetic field generated by the magnetic field generator relative to the coercive force of the hard magnetic thin film is 0.2 or lower. ### Claim 3 (depends on 2) The two-dimensional optical scanning mirror device according to claim 2, wherein the hard magnetic thin film becomes a reflecting mirror of the reflection portion. ### Claim 4 (depends on 2) The two-dimensional optical scanning mirror device according to claim 2, further comprising a reflective film that becomes a reflecting mirror of the reflection portion at least on a surface of the hard magnetic thin film. ### Claim 5 (depends on 2) The two-dimensional optical scanning mirror device according to claim 2, wherein the coercive force of the hard magnetic thin film is 100 kA/m or greater. ### Claim 6 (depends on 2) The two-dimensional optical scanning mirror device according to claim 2, wherein the magnetization direction of the hard magnetic thin film is at an angle within a range of 45°+/−30° relative to the high-speed optical scanning rotation axis and the low-speed optical scanning rotation axis of the movable mirror portion. ### Claim 7 (depends on 1) A two-dimensional optical scanning device, comprising: the two-dimensional optical scanning mirror device according to claim 1; and a light source formed on the substrate. ### Claim 8 (depends on 1) A two-dimensional optical scanning device, comprising: the two-dimensional optical scanning mirror device according to claim 1; a mounting substrate on which the two-dimensional optical scanning mirror device is mounted; and a light source that is mounted in such a location that the two-dimensional optical scanning mirror device on the mounting substrate is irradiated with the light beam. ### Claim 9 (depends on 7) An image projector, comprising: the two-dimensional optical scanning device according to claim 7; a two-dimensional optical scanning controller for two-dimensionally scanning the emission light emitted from the light source by applying a two-dimensional optical scanning signal; and an image formation unit for projecting the scanned emission light onto a projection surface. ### Claim 10 (depends on 8) An image projector, comprising: the two-dimensional optical scanning device according to claim 8; a two-dimensional optical scanning controller for two-dimensionally scanning the emission light emitted from the light source by applying the optical scanning signal; and an image formation unit for projecting the scanned emission light onto a projection surface.