# US 11,307,341 B2 · Method for manufacturing metal wire grid polarizer and display panel > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,307,341 B2 - Document ID: US11307341B2 - Status: Granted - Kind: B2 - Application number: 16/645,900 - Filed: 2019-10-23 - Published: 2021-07-15 - Granted: 2022-04-19 - Earliest claimed: 2018-11-16 - Assignees: Boe Technology Group Co., Ltd. - Applicants: Boe Technology Group Co., Ltd. - Inventors: Kang Guo; Yanhui Lu; Xin Gu - Web page: https://patentgrep.com/patent/US11307341B2 ## CPC - G02B 5/3058: {comprising electrically conductive elements, e.g. wire grids, conductive particles} - G02B 6/136: by etching - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A method for manufacturing a metal wire grid polarizer includes providing a template having grooves; forming a metal layer in the grooves, which comprises coating a metal thin film on a surface of the template on which the grooves are provided, and impressing the metal thin film so that the metal thin film is filled in the grooves to form a metal wire grid structure, the metal wire grid structure comprising the metal layer formed in the grooves and a cladding layer integrated with the metal layer and covering the surface of the template; and moving the metal layer to a substrate to manufacture the metal wire grid polarizer. ## Claims ### Claim 1 A method for manufacturing a metal wire grid polarizer, comprising: providing a template having grooves; forming a metal layer in the grooves by coating a metal thin film on a surface of the template on which the grooves are provided and impressing the metal thin film so that the metal thin film is filled in the grooves to form a metal wire grid structure, the metal wire grid structure comprising the metal layer formed in the grooves and a cladding layer integrated with the metal layer and covering the surface of the template; and moving the metal layer to a substrate to manufacture the metal wire grid polarizer; wherein moving the metal layer to the substrate comprises: providing the substrate on the cladding layer and bonding the metal wire grid structure to the substrate; separating the metal wire grid structure bonded to the substrate from the template; and etching the metal wire grid structure to etch away the cladding layer between the adjacent metal layers and expose a surface of the substrate, to obtain the metal wire grid polarizer. ### Claim 2 (depends on 1) The method for manufacturing the metal wire grid polarizer according to claim 1, wherein impressing the metal thin film comprises: coating an impact-resistance layer on a surface of the metal thin film; and impressing the impact-resistance layer and the metal thin film by using an impressing device so that the metal thin film is filled in the grooves and is formed into the metal wire grid structure. ### Claim 3 (depends on 1) The method for manufacturing the metal wire grid polarizer according to claim 1, wherein, before providing the substrate on the cladding layer, the method further comprises: thinning the cladding layer to make the cladding layer have a target thickness. ### Claim 4 (depends on 3) The method for manufacturing the metal wire grid polarizer according to claim 3, wherein the target thickness is less than 30 nm. ### Claim 5 (depends on 2) The method for manufacturing the metal wire grid polarizer according to claim 2, wherein coating the metal thin film on the surface of the template on which the grooves are provided comprises: depositing a release layer on the surface of the template on which the grooves are provided; and coating the metal thin film on the release layer. ### Claim 6 (depends on 5) The method for manufacturing the metal wire grid polarizer according to claim 5, wherein a material of the release layer comprises a metal material or a fluorine-containing organic compound. ### Claim 7 (depends on 1) The method for manufacturing the metal wire grid polarizer according to claim 1, wherein the impressing device is a laser. ### Claim 8 (depends on 2) The method for manufacturing the metal wire grid polarizer according to claim 2, wherein a material of the impact-resistance layer comprises graphite. ### Claim 9 (depends on 1) The method for manufacturing the metal wire grid polarizer according to claim 1, wherein providing the substrate on the cladding layer and bonding the metal wire grid structure to the substrate comprises: providing the substrate on the cladding layer and bonding the metal wire grid structure to the substrate by employing a bonding technology. ### Claim 10 (depends on 1) The method for manufacturing the metal wire grid polarizer according to claim 1, wherein a material of the metal layer comprises metallic aluminum or metallic silver. ### Claim 11 (depends on 1) The method for manufacturing the metal wire grid polarizer according to claim 1, wherein the substrate is a silicon wafer or glass. ### Claim 12 (depends on 3) The method for manufacturing the metal wire grid polarizer according to claim 3, wherein coating the metal thin film on the surface of the template on which the grooves are provided comprises: depositing a release layer on the surface of the template on which the grooves are provided; and coating the metal thin film on the release layer. ### Claim 13 (depends on 4) The method for manufacturing the metal wire grid polarizer according to claim 4, wherein coating the metal thin film on the surface of the template on which the grooves are provided comprises: depositing a release layer on the surface of the template on which the grooves are provided; and coating the metal thin film on the release layer. ### Claim 14 A display panel comprising a metal wire grid polarizer manufactured using a method for manufacturing the metal wire grid polarizer, the method comprising: providing a template having grooves; forming a metal layer in the grooves by coating a metal thin film on a surface of the template on which the grooves are provided and impressing the metal thin film so that the metal thin film is filled in the grooves to form a metal wire grid structure, the metal wire grid structure comprising the metal layer formed in the grooves and a cladding layer integrated with the metal layer and covering the surface of the template; and moving the metal layer to a substrate to manufacture the metal wire grid polarizer; wherein moving the metal layer to the substrate comprises: providing the substrate on the cladding layer and bonding the metal wire grid structure to the substrate; separating the metal wire grid structure bonded to the substrate from the template; and etching the metal wire grid structure to etch away the cladding layer between the adjacent metal layers and expose a surface of the substrate, to obtain the metal wire grid polarizer. ### Claim 15 A method for manufacturing a metal wire grid polarizer, comprising: providing a template having grooves; forming a metal layer in the grooves by coating a metal thin film on a surface of the template on which the grooves are provided and impressing the metal thin film so that the metal thin film is filled in the grooves to form a metal wire grid structure, the metal wire grid structure comprising the metal layer formed in the grooves and a cladding layer integrated with the metal layer and covering the surface of the template, wherein impressing the metal thin film comprises: coating an impact-resistance layer on a surface of the metal thin film; and impressing the impact-resistance layer and the metal thin film by using an impressing device so that the metal thin film is filled in the grooves and is formed into the metal wire grid structure; and moving the metal layer to a substrate to manufacture the metal wire grid polarizer, wherein the impressing device is a laser. ### Claim 16 (depends on 15) The method for manufacturing the metal wire grid polarizer according to claim 15, wherein, before providing the substrate on the cladding layer, the method further comprises thinning the cladding layer to make the cladding layer have a target thickness, wherein the target thickness is less than 30 nm. ### Claim 17 (depends on 15) The method for manufacturing the metal wire grid polarizer according to claim 15, wherein coating the metal thin film on the surface of the template on which the grooves are provided comprises: depositing a release layer on the surface of the template on which the grooves are provided; and coating the metal thin film on the release layer. ### Claim 18 (depends on 17) The method for manufacturing the metal wire grid polarizer according to claim 17, wherein a material of the release layer comprises a metal material or a fluorine-containing organic compound. ### Claim 19 (depends on 15) The method for manufacturing the metal wire grid polarizer according to claim 15, wherein a material of the impact-resistance layer comprises graphite. ### Claim 20 (depends on 15) The method for manufacturing the metal wire grid polarizer according to claim 15, wherein providing the substrate on the cladding layer and bonding the metal wire grid structure to the substrate comprises providing the substrate on the cladding layer and bonding the metal wire grid structure to the substrate by employing a bonding technology.