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US 11,307,335 B2Granted
Optical apparatus and methods and computer program products useful for manufacturing same
AssigneeMaradin Ltd.
InventorsInbal Herer, Adi Baram, Matan Naftali
Life of this patent
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Abstract
Optical apparatus comprising a MEMS substrate having a surface; and a stack of optical coatings which is deposited on the MEMS substrate's surface and which modifies at least one property of light impinging on the stack.
Claims13
An optical apparatus comprising:
- a MEMS substrate having a surface;
- and
- a stack of optical coatings which is deposited on the MEMS substrate's surface and which modifies at least one property of light impinging on the stack,
- wherein said at least one property comprises polarity,
- wherein the substrate comprises a scanning mirror and wherein the stack of optical coatings when deposited on the scanning mirror, reflects light, having wavelength in a given range and impinging on the stack at at least one angle, and also modifies at least one property of the light impinging at the at least one angle, thereby to generate reflected light which differs in at least one property from the light impinging at the at least one angle, and
- wherein the optical coatings are pre-tested to ensure that when the optical coatings are deposited on the MEMS substrate, the MEMS substrate does not break and does not bend.
3 more elements
A method for manufacturing optical apparatus comprising:
- providing a MEMS substrate having a surface;
- and
- depositing on the MEMS substrate's surface a stack of optical coatings which when so deposited, modifies at least one property of light impinging on the stack,
- wherein said at least one property comprises polarity,
- wherein the substrate comprises a scanning mirror and wherein the stack of optical coatings when deposited on the scanning mirror, reflects light, having wavelength in a given range and impinging on the stack at at least one angle, and also modifies at least one property of the light impinging at the at least one angle, thereby to generate reflected light which differs in at least one property from the light impinging at the at least one angle, and
- wherein the optical coatings are pre-tested to ensure that when the optical coatings are deposited on the MEMS substrate, the MEMS substrate does not break and does not bend.
3 more elements
Dependencies are inferred from the claim text.