# US 11,307,248 B2 · Contacting unit for a test handler for performing functional tests on semiconductor elements > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,307,248 B2 - Document ID: US11307248B2 - Status: Granted - Kind: B2 - Application number: 16/406,655 - Filed: 2019-05-08 - Published: 2019-09-12 - Granted: 2022-04-19 - Earliest claimed: 2018-03-08 - Applicants: Helmuth Heigl; Hubertus Heigl - Inventors: Helmuth Heigl; Hubertus Heigl - Web page: https://patentgrep.com/patent/US11307248B2 ## CPC - G01R 31/2891: {related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05)} - G01R 31/2874: {related to temperature} - G01R 31/2893: {Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A contacting unit (30) for a test handler (100) for carrying out functional tests on semiconductor elements having a surface, in particular on ICs (200), has a contacting module (60). The contacting module (60) comprises an inlet (61) through which a semiconductor element (200) to be tested is introduced into the contacting module (60), a test chamber (62) in which the semiconductor element (200) to be tested is fixed in a test position and subjected to the functional test, a movably arranged plunger (63) for fixing the semiconductor element to be tested in the test position, a first temperature sensor (64) arranged on the plunger (63) for measuring the surface temperature at the surface of the semiconductor element (200) to be tested, an air supply (65) for introducing a temperature control current into the test chamber (62), a controller for setting the temperature of the temperature control current depending on the surface temperature, at least one flushing chamber (70a, 70b, 70c) for flushing the test chamber (62), the first temperature sensor (64) or the air supply (65) with flushing air, and an outlet (66) through which the semiconductor element (200) is guided out of the contacting module (60) after the functional test. Furthermore, there is an air curtain at the inlet and outlet. In a method for controlling the contacting unit (30), the temperature of the temperature control current is controlled depending on the surface temperature. ## Claims ### Claim 1 Contacting unit (30) for a test handler (100) for carrying out functional tests on semiconductor elements (200) having a surface, characterised by a contacting module (60) which comprises: an inlet (61) through which a semiconductor element (200) to be tested is introduced into the contacting module (60); a test chamber (62) in which the semiconductor element (200) to be tested is fixed in a test position and subjected to the functional test; a movably arranged plunger (63) for fixing the semiconductor element (200) to be tested in the test position; a first temperature sensor (64) arranged on the plunger (63) for measuring the surface temperature at the surface of the semiconductor element (200) to be tested; an air supply (65) for introducing a temperature control current into the test chamber (62); a controller for setting the temperature of the temperature control current depending on the surface temperature; at least one flushing chamber (70a, 70b, 70c) for flushing the test chamber (62), the first temperature sensor (64) or the air supply (65) with flushing air, an outlet (66) through which the semiconductor element (200) is guided out of the contacting module (60) after the functional test; a guide unit (67) for guiding the semiconductor element (200) to be tested inside the contacting module (60), wherein the guide unit extends from the inlet (61) via the test chamber (62) to the outlet (66); and wherein the movably arranged plunger (63) is configured for movement towards the semiconductor element (200) to be tested when in the test chamber for fixing the semiconductor element (200) in the test position, and away from semiconductor element (200) in the test chamber after being tested to release the semiconductor element (200) and to allow movement of the semiconductor element (200) along the guide unit (67) to the outlet (66). ### Claim 2 (depends on 1) Contacting unit (30) according to claim 1, further characterised by the guide unit (67) having a test socket (68) forming the test position in the region of the test chamber (62). ### Claim 3 (depends on 2) Contacting unit (30) according to claim 2, characterised in that the guide unit (67) in the region of the test chamber (62) is mounted by means of at least one spring (79), the guide unit (67) with the semiconductor element (200) to be tested being movable by the plunger (63) towards the spring (79) in order to compress the spring (79). ### Claim 4 (depends on 2) Contacting unit (30) according to claim 2, characterised by at least one nozzle (69) for introducing a flow into the guide unit (67) in order to move the semiconductor element (200) to be tested along the guide unit (67). ### Claim 5 (depends on 1) Contacting unit (30) according to claim 1, characterised in that the first temperature sensor (64) is mounted in the plunger (63) biased by a spring (72), the plunger (63) being arranged in such a manner that it faces a top face or a bottom face of the semiconductor element (200) to be tested when it is arranged in the test position. ### Claim 6 (depends on 1) Contacting unit (30) according to claim 1, characterised by a movably arranged cross member (73) which moves the plunger (63) towards the test position in order to fix the semiconductor element to be tested in the test position. ### Claim 7 (depends on 6) Contacting unit (30) according to claim 6, wherein the cross member (73) is configured to be actuated by at least one ram (74). ### Claim 8 (depends on 7) Contacting unit (30) according to claim 7, wherein the at least one ram (74) comprises a temperature-stable material. ### Claim 9 (depends on 1) Contacting unit (30) according to claim 1, further characterised by a sensor, for detecting whether the semiconductor element (200) to be tested is arranged in the test position. ### Claim 10 (depends on 9) Contacting unit (30) according to claim 9, wherein the sensor comprises a light sensor (75). ### Claim 11 (depends on 1) Contacting unit (30) according to claim 1, characterised in that the contacting module (60) has a base (80) and a hood (85) detachably connected to the base, wherein the test chamber (62) is enclosed by the base (80) and the hood (85). ### Claim 12 (depends on 11) Contacting unit (30) according to claim 11, characterised in that the base (80) or the hood (85) are made of a temperature-stable plastic. ### Claim 13 (depends on 12) Contacting unit (30) according to claim 12, wherein the base (80) or the hood (85) are made of polyetheretherketone (PEEK) or polyphenylene sulphide (PPS). ### Claim 14 (depends on 13) Contacting unit (30) according to claim 13, further wherein the base (80) or the hood (85) are glass fibre-reinforced. ### Claim 15 (depends on 1) Contacting unit (30) according to claim 1, characterised in that the air supply (65) is aligned to direct the temperature control current to the test position so as to temper the semiconductor element (200) in the test position. ### Claim 16 (depends on 1) Contacting unit (30) according to claim 1, characterised by at least one air connection (71a, 71b, 71c) for introducing flushing air into the flushing chamber (70a, 70b, 70c). ### Claim 17 (depends on 16) Contacting unit (30) according to claim 16, characterised by an air outlet (76) for discharging the temperature control current from the contacting module (60). ### Claim 18 (depends on 17) Contacting unit (30) according to claim 17, wherein the air outlet (76) is directed upwards and away from the contacting unit (30) in the operating state of the handler unit (30). ### Claim 19 (depends on 1) Contacting unit (30) according to claim 1, characterised by a movably arranged stopping device (77) which stops the semiconductor element (200) to be tested when it reaches the test position. ### Claim 20 (depends on 1) Contacting unit (30) according to claim 1, characterised by a transition region (78) which can be flushed with air by means of the flushing chamber (70a, 70b, 70c), the transition region (78) forming a transition to a test board. ### Claim 21 (depends on 1) Contacting unit (30) according to claim 1, characterised in that the inlet (61) or the outlet (66) are shielded against extraneous air by means of an air curtain formed by flushing air. ### Claim 22 (depends on 1) Contacting unit (30) according to claim 1, characterised by a second temperature sensor (64a) for measuring the air temperature in the test chamber (62). ### Claim 23 (depends on 1) Method for controlling a contacting unit (30), wherein the contacting unit is defined according to claim 1, the method comprising measuring the surface temperature at the surface of a semiconductor element (200) to be tested with the first temperature sensor (64) arranged on the plunger (63), and controlling the temperature of the temperature control current depending on the measured surface temperature. ### Claim 24 (depends on 23) Method according to claim 23, characterised in that the surface temperature is measured by means of the first temperature sensor (64) directly on the surface of the semiconductor element (200) to be tested, the surface being contacted by the first temperature sensor (64) in a contacting manner at least at one point.