# US 11,307,233 B1 · Vapor cells having stacks of layers defining target three-dimensional volumes for internal cavities

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- Number: US 11,307,233 B1
- Document ID: US11307233B1
- Status: Granted
- Kind: B1
- Application number: 17/480,451
- Filed: 2021-09-21
- Granted: 2022-04-19
- Earliest claimed: 2021-04-13
- Assignees: Quantum Valley Ideas Laboratories
- Applicants: Quantum Valley Ideas Laboratories
- Inventors: Hadi Amarloo; Jennifer Ann Joe Erskine; Jaime Ramirez-Serrano; Somayeh M. A. Mirzaee; James P. Shaffer
- Web page: https://patentgrep.com/patent/US11307233B1

## CPC

- C03C 27/10: with the aid of adhesive specially adapted for that purpose
- G01R 29/0885: {using optical probes, e.g. electro-optical, luminescent, glow discharge, or optical interferometers}
- B32B 17/06: comprising glass as the main or only constituent of a layer, next to another layer of a specific {material}
- C03C 27/06: Joining glass to glass by processes other than fusing (fusing C03B23/20; units for use as elements for closing wall or like openings and comprising two or more parallel glass panes in spaced relationship, the panes being permanently secured together E06B3/66)
- G01N 21/0303: {Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment (G01N21/031 - G01N21/15 take precedence)}
- G01R 29/0892: {Details related to signal analysis or treatment; presenting results, e.g. displays; measuring specific signal features other than field strength, e.g. polarisation, field modes, phase, envelope, maximum value}
- G01R 33/0052: {Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips (devices based on galvano-magnetic effect or the like H10N50/85)}
- G01R 33/26: using optical pumping
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

In a general aspect, a vapor cell includes a body defined by a stack of layers bonded to each other. The stack of layers includes a first end layer disposed at a first end of the body and a second end layer disposed at a second, opposite end of the body. Intermediate layers extend between the first and second end layers and define an internal cavity extending through the body between the first end layer and the second end layer. Each intermediate layer includes a through-hole that defines a portion of the internal cavity through the intermediate layer. The vapor cell also includes a vapor or a source of the vapor disposed in the internal cavity.

## Claims

### Claim 1

A vapor cell, comprising:
a body defined by a stack of layers bonded to each other, the stack of layers comprising:
a first end layer at a first end of the body, the first end layer being formed of a first type of dielectric material that is optically transparent,
a second end layer at a second, opposite end of the body, the second end layer being formed of dielectric material,
intermediate layers between the first and second end layers and formed of dielectric material, wherein:
the intermediate layers define an internal cavity that extends through the body between the first end layer and the second end layer, and
each intermediate layer comprises a through-hole that defines a portion of the internal cavity through the intermediate layer; and
a vapor or a source of the vapor disposed in the internal cavity.

### Claim 2 (depends on 1)

The vapor cell of claim 1, wherein at least two adjacent intermediate layers have respective through-holes that differ, relative to each other, in one or both of shape and size.

### Claim 3 (depends on 1)

The vapor cell of claim 1, wherein the second end layer is formed of the first type of dielectric material.

### Claim 4 (depends on 1)

The vapor cell of claim 1, wherein the intermediate layers comprise:
a first subset of layers formed of the first type of dielectric material; and
a second subset of layers formed of a second, different type of dielectric material.

### Claim 5 (depends on 4)

The vapor cell of claim 4, wherein the layers are ordered in the stack to alternate between the first type of dielectric material and the second type of dielectric material.

### Claim 6 (depends on 1)

The vapor cell of claim 1, wherein the stack of layers comprises:
a first set of tabs extending outward from the intermediate layers on a first exterior side of the body; and
a second set of tabs extending outward from the intermediate layers on a second exterior side of the body.

### Claim 7 (depends on 6)

The vapor cell of claim 6,
wherein the vapor cell is a first vapor cell;
wherein the first set of tabs defines a first mechanical interface that is configured to interlock with a second vapor cell; and
wherein the second set of tabs defines a second mechanical interface that is configured to interlock with a third vapor cell.

### Claim 8 (depends on 6)

The vapor cell of claim 6, wherein the first and second sets of tabs are aligned with respective centers of the first and second exterior sides.

### Claim 9 (depends on 6)

The vapor cell of claim 6,
wherein the intermediate layers comprise a first subset of layers and a second subset of layers that alternate in sequence along the stack of layers;
wherein each tab of the first set extends outward from a respective layer in the first subset of layers; and
wherein each tab of the second set extends outward from a respective layer in the second subset of layers.

### Claim 10 (depends on 6)

A plurality of vapor cells, each corresponding to the vapor cell of claim 6, in which the first and second sets of tabs of each vapor cell are interlocked with, respectively, the second set of tabs of a first vapor cell and the first set of tabs of a second, different vapor cell.

### Claim 11 (depends on 1)

The vapor cell of claim 1, wherein at least one of the intermediate layers comprises a plurality of holes between the internal cavity and an outer perimeter of the intermediate layer.

### Claim 12 (depends on 11)

The vapor cell of claim 11, wherein the plurality of holes extends through the intermediate layer.

### Claim 13 (depends on 11)

The vapor cell of claim 11,
wherein the vapor cell is configured to detect a target radiation; and
wherein each of the plurality of holes has a largest dimension no greater than a wavelength of the target radiation.

### Claim 14 (depends on 1)

The vapor cell of claim 1,
wherein the first end layer comprises:
an interior surface covering a first opening of the internal cavity adjacent the first end layer, and
an exterior surface opposite the interior surface; and
wherein one or both of the interior and exterior surfaces have an optical coating disposed thereon.

### Claim 15 (depends on 1)

The vapor cell of claim 1,
wherein the body has four exterior sides defining a square cross-section of the body, the four exterior sides comprising first and second exterior sides; and
wherein the stack of layers comprises:
a first set of tabs extending outward from the intermediate layers on the first exterior side of the body, and
a second set of tabs extending outward from the intermediate layers on the second exterior side of the body.

### Claim 16 (depends on 15)

The vapor cell of claim 15, wherein the first and second exterior sides are adjacent to each other.

### Claim 17 (depends on 15)

The vapor cell of claim 15, wherein the first and second exterior sides are opposite each other.

### Claim 18

A method of manufacturing a vapor cell, the method comprising:
obtaining a stack of layers bonded to each other and comprising:
a first end layer formed of a first type of dielectric material that is optically transparent,
intermediate layers formed of dielectric material and extending in sequence from a first intermediate layer to a last intermediate layer, wherein:
the first intermediate layer is bonded to the first end layer,
an internal cavity extends through the intermediate layers and comprises an opening defined by a surface of the last intermediate layer, and
each intermediate layer comprises a through-hole that defines a portion of the internal cavity through the intermediate layer; and
disposing a vapor or a source of the vapor into the internal cavity; and
bonding a second end layer of the stack of layers to the last intermediate layer to seal the vapor or the source of the vapor in the internal cavity, the second end layer formed of dielectric material;
wherein the stack of layers, when comprising the bonded second end layer, defines a body of the vapor cell, the first end layer at a first end of the body and the second end layer at a second, opposite end of the body.

### Claim 19 (depends on 18)

The method of claim 18, wherein at least two adjacent intermediate layers have respective through-holes that differ, relative to each other, in one or both of shape and size.

### Claim 20 (depends on 18)

The method of claim 18, wherein bonding the second end layer comprises covering the opening of the internal cavity with the second end layer to enclose the vapor or the source of the vapor in the internal cavity.

### Claim 21 (depends on 18)

The method of claim 18, wherein the second end layer is formed of the first type of dielectric material.

### Claim 22 (depends on 18)

The method of claim 18, wherein the intermediate layers comprise:
a first subset of layers formed of the first type of dielectric material; and
a second subset of layers formed of a second, different type of dielectric material.

### Claim 23 (depends on 22)

The method of claim 22, wherein obtaining the stack of layers comprises:
alternately bonding layers of the first and second subset of layers to each other to form the intermediate layers; and
bonding the first intermediate layer to the first end layer.

### Claim 24 (depends on 22)

The method of claim 22, wherein obtaining the stack of layers comprises:
removing material from a first wafer formed of the first type of dielectric material to fabricate the first end layer, one or more of the first subset of layers, or both; and
removing material from a second wafer formed of the second type of dielectric material to fabricate one or more of the second subset of layers.

### Claim 25 (depends on 18)

The method of claim 18, wherein bonding the second end layer comprises:
altering the surface of the last intermediate layer to comprise a first plurality of hydroxyl ligands;
altering a surface of the second end layer to comprise a second plurality of hydroxyl ligands; and
contacting the altered surfaces to form a seal around the opening of the internal cavity, the seal defined by metal-oxygen bonds formed by reacting the first plurality of hydroxyl ligands with the second plurality of hydroxyl ligands during contact of the two altered surfaces.

### Claim 26 (depends on 25)

The method of claim 25, wherein bonding the second end layer comprises:
activating one or both of the surfaces of the last intermediate layer and the second end layer by exposing their respective surfaces to a plasma.

### Claim 27 (depends on 18)

The method of claim 18, wherein at least one of the intermediate layers comprises a plurality of the holes between the internal cavity and an outer perimeter of the intermediate layer.

### Claim 28 (depends on 18)

The method of claim 18, wherein obtaining the stack of layers comprises:
forming an adhesion layer on one or both sides of an intermediate layer to define respective bonding surfaces of the intermediate layer.

### Claim 29 (depends on 18)

The method of claim 18, wherein the stack of layers comprises:
a first set of tabs extending outward from the intermediate layers on a first exterior side of the stack of layers; and
a second set of tabs extending outward from the intermediate layers on a second exterior side of the stack of layers.

### Claim 30 (depends on 29)

The method of claim 29,
wherein the vapor cell is a first vapor cell;
wherein the first set of tabs defines a first mechanical interface that is configured to interlock with a second vapor cell; and
wherein the second set of tabs defines a second mechanical interface that is configured to interlock with a third vapor cell.