# US 11,307,222 B2 · Contact probe for a testing head for testing electronic devices

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- Number: US 11,307,222 B2
- Document ID: US11307222B2
- Status: Granted
- Kind: B2
- Application number: 16/903,948
- Filed: 2020-06-17
- Published: 2020-12-03
- Granted: 2022-04-19
- Earliest claimed: 2018-12-03
- Assignees: Technoprobe S.P.A.
- Applicants: Technoprobe S.p.A.
- Inventors: Fabio Morgana
- Web page: https://patentgrep.com/patent/US11307222B2

## CPC

- G01R 1/06744: {Microprobes, i.e. having dimensions as IC details}
- G01R 1/06738: {related to tip portion}
- G01R 1/06755: {Material aspects}
- G01R 1/073: Multiple probes
- G01R 31/26: Testing of individual semiconductor devices (testing of photovoltaic devices H02S50/10; testing or measuring during manufacture or treatment {H10P74/00})
- G01R 1/07357: {with flexible bodies, e.g. buckling beams}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A contact probe for a testing head for testing electronic devices includes a rod-like body made of a first conductive material and extending along a longitudinal axis, and a contact tip supported by the body at an end portion thereof. The contact tip is made of a second conductive material that is different from the first conductive material. The contact tip includes a contact zone configured to perform mechanical and electrical contact with contact pads of a device under test. The body and the contact tip include respective contact surfaces in contact with each other. The contact surfaces are complementary to each other and include respective connection elements engaging each other. The connection elements include a protruding element projecting from the contact surface of one among the body and the contact tip, and a recess made in the other among the body and the contact tip.

## Claims

### Claim 1

A contact probe for a testing head for testing electronic devices, comprising:
a rod-like body, which is made of a first conductive material and extends along a longitudinal axis, the body having an end portion including an end surface; and
a contact tip supported by the body at the end portion thereof, the contact tip being made of a second conductive material that is different from the first conductive material of the body, the contact tip comprising a contact zone configured to perform mechanical and electrical contact with contact pads of a device under test,
wherein the body and the contact tip comprise respective contact surfaces being in contact with each other, the contact surfaces being complementary to each other and shaped so as to comprise respective connection elements engaging each other,
wherein the connection elements are in the form of at least one protruding element projecting from the contact surface of one among the body and the contact tip, and in the form of at least one respective recess made in the other among said body and said contact tip, and
wherein a first portion of the end surface of the body extends laterally from a first side of the connection element of the body to a first side surface of the body, a second portion of the end surface of the body extends laterally from a second side of the connection element of the body to a second side surface of the body that is opposite the first side surface, and the contact surface of the contact tip entirely covers the first and second portions of the end surface of the body.

### Claim 2 (depends on 1)

The contact probe according to claim 1, wherein a maximum cross-section of the contact tip is equal to a maximum cross-section of the body.

### Claim 3 (depends on 1)

The contact probe according to claim 1, wherein the at least one protruding element and the at least one recess have at least one arc-shaped portion.

### Claim 4 (depends on 1)

The contact probe according to claim 1, wherein the contact tip comprises at least one blunted portion.

### Claim 5 (depends on 1)

The contact probe according to claim 1, wherein at least one cross-sectional dimension of a portion of the contact tip is smaller than a corresponding cross-sectional dimension of the body, said at least one cross-sectional dimension being orthogonal to said longitudinal axis.

### Claim 6 (depends on 5)

The contact probe according to claim 5, wherein the contact tip comprises a thinned portion which extends along said longitudinal axis and has a substantially constant cross-section corresponding to the extension of the contact zone.

### Claim 7 (depends on 6)

The contact probe according to claim 6, wherein the thinned portion has a length measured along said longitudinal axis comprised between 30 μm and 600 μm.

### Claim 8 (depends on 6)

The contact probe according to claim 6, wherein the thinned portion is centered with respect to a symmetry axis of the body.

### Claim 9 (depends on 1)

The contact probe according to claim 1, wherein the first conductive material of the body is copper.

### Claim 10 (depends on 1)

The contact probe according to claim 1, wherein the second conductive material of the contact tip is selected from rhodium, palladium, iridium, platinum, or alloys thereof.

### Claim 11 (depends on 1)

The contact probe according to claim 1, wherein the protruding element has a length, measured along the longitudinal axis, between 10 μm and 100 μm.

### Claim 12 (depends on 1)

The contact probe according to claim 1, wherein the contact zone is comprised only in the contact tip.

### Claim 13 (depends on 1)

The contact probe according to claim 1, wherein the contact tip is tapered.

### Claim 14 (depends on 1)

The contact probe according to claim 1, wherein the transversal dimensions of the body and of the contact tip are coincident.

### Claim 15

A testing head for testing electronic devices, comprising:
at least one guide provided with a plurality of guide holes; and
a plurality of contact probes housed in the guide holes, respectively, at least one of the contact probes comprising:
a rod-like body, which is made of a first conductive material and extends along a longitudinal axis, the body having an end portion including an end surface; and
a contact tip supported by the body at the end portion thereof, the contact tip being made of a second conductive material that is different from the first conductive material of the body, the contact tip comprising a contact zone configured to perform mechanical and electrical contact with contact pads of a device under test,
wherein the body and the contact tip comprise respective contact surfaces being in contact with each other, the contact surfaces being complementary to each other and shaped so as to comprise respective connection elements engaging each other,
wherein the connection elements are in the form of at least one protruding element projecting from the contact surface of one among the body and the contact tip, and in the form of at least one respective recess made in the other among said body and said contact tip, and
wherein a first portion of the end surface of the body extends laterally from a first side of the connection element of the body to a first side surface of the body, a second portion of the end surface of the body extends laterally from a second side of the connection element of the body to a second side surface of the body that is opposite the first side surface, and the contact surface of the contact tip entirely covers the first and second portions of the end surface of the body.
