Resonant accelerometer

A system comprising:

• a proof mass;
• an anchor located in an opening, the opening defined by a body of the proof mass;
• a spring between the proof mass and the anchor, wherein the spring and the proof mass form a spring system suspended from the anchor;
• a first drive electrode;
• a first sense beam with a first end attached to the proof mass, the first sense beam configured to oscillate at a particular resonance frequency based on application of a signal to the first drive electrode, wherein the resonance frequency changes according to a force generated by the proof mass in response to acceleration, and wherein the proof mass generates the force by pivoting about a point along the spring;
• a support structure located in the opening, wherein:
• the support structure is coupled to the anchor and includes a support beam that is attached to and parallel with the spring,
• the first sense beam includes a second end attached to the support beam such that the first sense beam is orthogonal to the support beam and the spring, and
• the support structure operates as a stress decoupling area that prevents or limits propagation of stress from the anchor to the first sense beam and the spring system;
• and
• one or more processors configured to:
• generate the signal applied to the first drive electrode;
• and
• calculate an acceleration value based on a signal indicating a change in the resonance frequency of the first sense beam.

A method comprising:

• generating, by an electronic controller of an accelerometer, a signal applied to a drive electrode to cause a sense beam to oscillate at a particular resonance frequency, wherein:
• the resonance frequency changes according to a force generated by a proof mass in response to acceleration,
• the proof mass generates the force by pivoting about a point along a spring,
• the spring is between the proof mass and an anchor,
• the anchor is located in an opening defined by a body of the proof mass,
• the spring and the proof mass form a spring system suspended from the anchor through a support structure located in the opening,
• the support structure is coupled to the anchor and includes a support beam that is attached to and parallel with the spring,
• the sense beam includes a first end attached to the proof mass and a second end attached to the support beam such that the sense beam is orthogonal to the support beam and the spring, and
• the support structure operates as a stress decoupling area that prevents or limits propagation of stress from the anchor to the sense beam and the spring system;
• and
• calculating, by the electronic controller, an acceleration value based on a signal indicating a change in the resonance frequency of the sense beam.