# US 11,307,191 B2 · Multi-dimensional integrated circuit for real-time monitoring of a fluidic environment

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- Number: US 11,307,191 B2
- Document ID: US11307191B2
- Status: Granted
- Kind: B2
- Application number: 16/993,746
- Filed: 2020-08-14
- Published: 2021-02-25
- Granted: 2022-04-19
- Earliest claimed: 2019-08-22
- Assignees: King Abdullah University of Science and Technology
- Applicants: King Abdullah University of Science and Technology
- Inventors: Nazek Mohamad El-Atab; Muhammad Mustafa Hussain
- Web page: https://patentgrep.com/patent/US11307191B2

## CPC

- G01N 33/18: Water
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A multi-dimensional integrated circuit (MD-IC) device for monitoring one or more parameters of a fluid includes plural faces, each face having plural interlocks extending from a periphery of the face for interlocking with corresponding interlocks of another face of the plural faces; the plural faces are mechanically attached to each other and electrically connected through the interlocks to form a closed chamber; an energy harvester placed on an outside surface of a first face of the plural faces; a fluidic monitoring sensor placed on an outside surface of a second face of the plural faces; a processor placed within the closed chamber; and a battery placed within the closed chamber and configured to receive the electrical energy from the energy harvester and to provide the electrical energy to the processor and the water monitoring sensor.

## Claims

### Claim 1

A multi-dimensional integrated circuit (MD-IC) device for monitoring one or more parameters of a fluid, the device comprising:
plural faces, each face having plural interlocks extending from a periphery of the face for interlocking with corresponding interlocks of another face of the plural faces;
the plural faces are mechanically attached to each other and electrically connected through the interlocks to form a closed chamber;
an energy harvester placed on an outside surface of a first face of the plural faces, so that the energy harvester converts solar energy into electrical energy;
a fluidic monitoring sensor placed on an outside surface of a second face of the plural faces, so that the fluidic monitoring sensor monitors the one or more parameters of the fluid;
a processor placed within the closed chamber; and
a battery placed within the closed chamber and configured to receive the electrical energy from the energy harvester and to provide the electrical energy to the processor and the water monitoring sensor.

### Claim 2 (depends on 1)

The device of claim 1, wherein the fluidic monitoring sensor includes:
a pH sensor;
a temperature sensor;
a salinity sensor; and
an ammonia sensor.

### Claim 3 (depends on 1)

The device of claim 1, further comprising:
an air monitoring sensor located on an outside surface of a third face of the plural faces.

### Claim 4 (depends on 3)

The device of claim 3, further comprising:
an antenna located on an outside of the chamber; and
a communication unit located inside the chamber and configured to transmit data to an external device through the antenna.

### Claim 5 (depends on 4)

The device of claim 4, further comprising:
a light emitting device located on the first surface and configured to illuminate following a certain pattern when a value of the measured parameter is higher than a given threshold.

### Claim 6 (depends on 1)

The device of claim 1, wherein each face of the plural faces is mechanically and electrically connected to at least three other faces of the plural faces through the interlocks.

### Claim 7 (depends on 1)

The device of claim 1, further comprising:
a layer of a polymer located at interfaces between the plural faces to seal the closed chamber.

### Claim 8 (depends on 7)

The device of claim 7, wherein the layer of polymer does not cover the fluidic monitoring sensor.

### Claim 9 (depends on 7)

The device of claim 7, wherein the closed chamber is a cube, the first face is a top face, the second face is a bottom face, and an amount of the polymer layer on the bottom face is larger than on each of the other faces so that MD-IC device floats in the fluid with the bottom face in full contact with the fluid.

### Claim 10 (depends on 7)

The device of claim 7, wherein the layer of polymer has micro-channels so that the fluid enters through the micro-channels to cool off the closed chamber.

### Claim 11 (depends on 1)

The device of claim 1, wherein the closed chamber is a pyramid or a sphere.

### Claim 12 (depends on 1)

The device of claim 1, wherein each face is made of a semiconductor material and each face has semiconductor devices on both the internal and external surfaces.

### Claim 13 (depends on 12)

The device of claim 12, wherein the internal surface of the semiconductor material is polished and the external surface of the semiconductor material is not polished.

### Claim 14 (depends on 12)

The device of claim 12, wherein the first face has a substrate made of a first semiconductor material and the second face has a substrate made of a second semiconductor material, which is different from the first semiconductor material, and wherein the interlocks are metalized for conducting electrical signals from one face to another face of the plural faces.

### Claim 15

A multi-dimensional integrated circuit (MD-IC) device for monitoring one or more parameters in a fluid, the system comprising:
plural faces, each face having plural interlocks on a periphery for interlocking with corresponding interlocks of another face of the plural faces;
the plural faces are attached to each other through the interlocks to form a closed chamber;
an energy harvester is placed on an outside surface of a first face of the plural faces, so that the energy harvester converts solar energy into electrical energy;
a fluidic monitoring sensor is placed on an outside surface of a second face of the plural faces, so that the fluidic monitoring sensor monitors the one or more parameters of the fluid;
an air monitoring sensor is placed on an outside surface of a third face of the plural faces, so that the air monitoring sensor monitors an air parameter, wherein the third face is mechanically connected to both the first face and the second face; and
a polymer layer externally covering connections between the plural faces to seal the closed chamber from ambient,
wherein the polymer layer on the second face is thicker than on the first and third faces so that the third face is a bottom face and stays in contact with the fluid, the first face is a top face and exposes the energy harvester to sun, and the third face is a side face that exposes the air monitoring sensors to air.

### Claim 16 (depends on 15)

The device of claim 15, wherein each face is made of a semiconductor material and the first and second faces have semiconductor devices on both the internal and external surfaces.

### Claim 17 (depends on 16)

The device of claim 16, wherein the internal surface of the semiconductor material is polished and the external surface of the semiconductor material is not polished.

### Claim 18 (depends on 16)

The device of claim 16, wherein the first face has a substrate made of a first semiconductor material and the second face has a substrate made of a second semiconductor material, which is different from the first semiconductor material.

### Claim 19 (depends on 15)

The device of claim 15, further comprising:
micro-channels formed in the polymer layer for cooling.

### Claim 20

A method of manufacturing a multi-dimensional integrated circuit (MD-IC) device that monitors one or more parameters in a fluid, the method comprising:
providing plural faces, each face having plural interlocks on a periphery for interlocking with corresponding interlocks of another face of the plural faces;
placing an energy harvester on an outside surface of a first face of the plural faces, so that the energy harvester converts solar energy into electrical energy;
placing a fluidic monitoring sensor on an outside surface of a second face of the plural faces, so that the fluidic monitoring sensor monitors the one or more parameters of the fluid;
placing a processor on an inside surface of a face of the plural faces;
placing a battery on an inside surface of another face of the plural faces, wherein the battery is configured to receive the electrical energy from the energy harvester and to provide the electrical energy to the processor and the fluidic monitoring sensor;
placing an air monitoring sensor on an outside surface of a third face of the plural faces, so that the air monitoring sensor monitors an air parameter;
directly attaching each face of the plural faces to at least three other faces with the interlocks to form a closed chamber; and
sealing each connection between any two faces with a polymer layer to seal the closed chamber from an ambient.
